Research output: Contribution to journal › Article › peer-review
Formation of periodic superhydrophilic microstructures by infrared nanosecond laser processing of single-crystal silicon. / Starinskiy, Sergey V.; Rodionov, Alexey A.; Shukhov, Yuri G. et al.
In: Applied Surface Science, Vol. 512, 145753, 15.05.2020.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Formation of periodic superhydrophilic microstructures by infrared nanosecond laser processing of single-crystal silicon
AU - Starinskiy, Sergey V.
AU - Rodionov, Alexey A.
AU - Shukhov, Yuri G.
AU - Safonov, Alexey I.
AU - Maximovskiy, Eugene A.
AU - Sulyaeva, Veronica S.
AU - Bulgakov, Alexander V.
N1 - Publisher Copyright: © 2020
PY - 2020/5/15
Y1 - 2020/5/15
N2 - The evolution of the morphology and composition of the single-crystal silicon surface irradiated by infrared and visible nanosecond laser pulses is investigated as a function of processing parameters (laser fluence, irradiation spot size, the number of pulses, background gas pressure and composition). Two types of periodic surface microstructures are obtained with IR (1064 nm) laser pulses in a narrow fluence range of 3–6 J/cm2. At a relatively low number of laser pulses applied, a grid of cleavage cracks is produced within the irradiation spot along the crystal orientation. With further Si irradiation, periodic microhillocks are formed in the nodes of the crack grid. Silicon surface with such microhillocks exhibits superhydrophilic properties which are retained during prolonged storage in air. The cracks are produced in any environment (including vacuum) but the microhillocks are observed only in the presence of oxygen. No periodic structures were observed with visible (532 nm) laser pulses. Mechanisms of nanosecond laser-induced periodic microstructure formation on silicon are discussed.
AB - The evolution of the morphology and composition of the single-crystal silicon surface irradiated by infrared and visible nanosecond laser pulses is investigated as a function of processing parameters (laser fluence, irradiation spot size, the number of pulses, background gas pressure and composition). Two types of periodic surface microstructures are obtained with IR (1064 nm) laser pulses in a narrow fluence range of 3–6 J/cm2. At a relatively low number of laser pulses applied, a grid of cleavage cracks is produced within the irradiation spot along the crystal orientation. With further Si irradiation, periodic microhillocks are formed in the nodes of the crack grid. Silicon surface with such microhillocks exhibits superhydrophilic properties which are retained during prolonged storage in air. The cracks are produced in any environment (including vacuum) but the microhillocks are observed only in the presence of oxygen. No periodic structures were observed with visible (532 nm) laser pulses. Mechanisms of nanosecond laser-induced periodic microstructure formation on silicon are discussed.
KW - Damage threshold
KW - Nanosecond laser ablation
KW - Oxidation
KW - Periodic microstructures
KW - Silicon
KW - Superhydrophilicity
KW - CRYSTALLIZATION
KW - WETTABILITY
KW - SEMICONDUCTORS
KW - DEPOSITION
KW - MECHANISMS
KW - INDUCED DAMAGE
KW - GERMANIUM
KW - THERMAL-PROPERTIES
KW - SURFACE
KW - ABLATION
UR - http://www.scopus.com/inward/record.url?scp=85079650404&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2020.145753
DO - 10.1016/j.apsusc.2020.145753
M3 - Article
AN - SCOPUS:85079650404
VL - 512
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
M1 - 145753
ER -
ID: 23595065