Formation of periodic superhydrophilic microstructures by infrared nanosecond laser processing of single-crystal silicon

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Formation of periodic superhydrophilic microstructures by infrared nanosecond laser processing of single-crystal silicon. / Starinskiy, Sergey V.; Rodionov, Alexey A.; Shukhov, Yuri G. и др.

в: Applied Surface Science, Том 512, 145753, 15.05.2020.

Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование

BibTeX

@article{8ef7fbad407c4a7eac6a0834c0a27480,

title = "Formation of periodic superhydrophilic microstructures by infrared nanosecond laser processing of single-crystal silicon",

abstract = "The evolution of the morphology and composition of the single-crystal silicon surface irradiated by infrared and visible nanosecond laser pulses is investigated as a function of processing parameters (laser fluence, irradiation spot size, the number of pulses, background gas pressure and composition). Two types of periodic surface microstructures are obtained with IR (1064 nm) laser pulses in a narrow fluence range of 3–6 J/cm2. At a relatively low number of laser pulses applied, a grid of cleavage cracks is produced within the irradiation spot along the crystal orientation. With further Si irradiation, periodic microhillocks are formed in the nodes of the crack grid. Silicon surface with such microhillocks exhibits superhydrophilic properties which are retained during prolonged storage in air. The cracks are produced in any environment (including vacuum) but the microhillocks are observed only in the presence of oxygen. No periodic structures were observed with visible (532 nm) laser pulses. Mechanisms of nanosecond laser-induced periodic microstructure formation on silicon are discussed.",

keywords = "Damage threshold, Nanosecond laser ablation, Oxidation, Periodic microstructures, Silicon, Superhydrophilicity, CRYSTALLIZATION, WETTABILITY, SEMICONDUCTORS, DEPOSITION, MECHANISMS, INDUCED DAMAGE, GERMANIUM, THERMAL-PROPERTIES, SURFACE, ABLATION",

author = "Starinskiy, {Sergey V.} and Rodionov, {Alexey A.} and Shukhov, {Yuri G.} and Safonov, {Alexey I.} and Maximovskiy, {Eugene A.} and Sulyaeva, {Veronica S.} and Bulgakov, {Alexander V.}",

note = "Publisher Copyright: {\textcopyright} 2020",

year = "2020",

month = may,

day = "15",

doi = "10.1016/j.apsusc.2020.145753",

language = "English",

volume = "512",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

}

RIS

TY - JOUR

T1 - Formation of periodic superhydrophilic microstructures by infrared nanosecond laser processing of single-crystal silicon

AU - Starinskiy, Sergey V.

AU - Rodionov, Alexey A.

AU - Shukhov, Yuri G.

AU - Safonov, Alexey I.

AU - Maximovskiy, Eugene A.

AU - Sulyaeva, Veronica S.

AU - Bulgakov, Alexander V.

PY - 2020/5/15

Y1 - 2020/5/15

N2 - The evolution of the morphology and composition of the single-crystal silicon surface irradiated by infrared and visible nanosecond laser pulses is investigated as a function of processing parameters (laser fluence, irradiation spot size, the number of pulses, background gas pressure and composition). Two types of periodic surface microstructures are obtained with IR (1064 nm) laser pulses in a narrow fluence range of 3–6 J/cm2. At a relatively low number of laser pulses applied, a grid of cleavage cracks is produced within the irradiation spot along the crystal orientation. With further Si irradiation, periodic microhillocks are formed in the nodes of the crack grid. Silicon surface with such microhillocks exhibits superhydrophilic properties which are retained during prolonged storage in air. The cracks are produced in any environment (including vacuum) but the microhillocks are observed only in the presence of oxygen. No periodic structures were observed with visible (532 nm) laser pulses. Mechanisms of nanosecond laser-induced periodic microstructure formation on silicon are discussed.

AB - The evolution of the morphology and composition of the single-crystal silicon surface irradiated by infrared and visible nanosecond laser pulses is investigated as a function of processing parameters (laser fluence, irradiation spot size, the number of pulses, background gas pressure and composition). Two types of periodic surface microstructures are obtained with IR (1064 nm) laser pulses in a narrow fluence range of 3–6 J/cm2. At a relatively low number of laser pulses applied, a grid of cleavage cracks is produced within the irradiation spot along the crystal orientation. With further Si irradiation, periodic microhillocks are formed in the nodes of the crack grid. Silicon surface with such microhillocks exhibits superhydrophilic properties which are retained during prolonged storage in air. The cracks are produced in any environment (including vacuum) but the microhillocks are observed only in the presence of oxygen. No periodic structures were observed with visible (532 nm) laser pulses. Mechanisms of nanosecond laser-induced periodic microstructure formation on silicon are discussed.

KW - Damage threshold

KW - Nanosecond laser ablation

KW - Oxidation

KW - Periodic microstructures

KW - Silicon

KW - Superhydrophilicity

KW - CRYSTALLIZATION

KW - WETTABILITY

KW - SEMICONDUCTORS

KW - DEPOSITION

KW - MECHANISMS

KW - INDUCED DAMAGE

KW - GERMANIUM

KW - THERMAL-PROPERTIES

KW - SURFACE

KW - ABLATION

UR - http://www.scopus.com/inward/record.url?scp=85079650404&partnerID=8YFLogxK

U2 - 10.1016/j.apsusc.2020.145753

DO - 10.1016/j.apsusc.2020.145753

M3 - Article

AN - SCOPUS:85079650404

VL - 512

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

M1 - 145753

ER -

ID: 23595065