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Formation of periodic superhydrophilic microstructures by infrared nanosecond laser processing of single-crystal silicon

Research output: Contribution to journal › Article › peer-review

DOI

https://doi.org/10.1016/j.apsusc.2020.145753
Final published version

Sergey V. Starinskiy
Alexey A. Rodionov
Yuri G. Shukhov
Alexey I. Safonov
Eugene A. Maximovskiy
Veronica S. Sulyaeva
Alexander V. Bulgakov

Original language	English
Article number	145753
Number of pages	10
Journal	Applied Surface Science
Volume	512
DOIs	https://doi.org/10.1016/j.apsusc.2020.145753
Publication status	Published - 15 May 2020

OECD FOS+WOS

Research areas

Damage threshold, Nanosecond laser ablation, Oxidation, Periodic microstructures, Silicon, Superhydrophilicity, CRYSTALLIZATION, WETTABILITY, SEMICONDUCTORS, DEPOSITION, MECHANISMS, INDUCED DAMAGE, GERMANIUM, THERMAL-PROPERTIES, SURFACE, ABLATION

ID: 23595065