Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers

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Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers. / Nikolaev, I. V.; Korobeishchikov, N. G.; Lapega, A. V.

In: Moscow University Physics Bulletin, Vol. 79, No. 3, 06.2024, p. 330-335.

Research output: Contribution to journal › Article › peer-review

BibTeX

@article{a8e71c73abcf4ef393dd3f19221c4084,

title = "Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers",

abstract = "The surface treatment of single-crystal germanium with an argon cluster ion beam has been investigated. The original surface of the germanium wafers was bombarded with argon cluster ions with high (105 eV/atom) and low (10 eV/atom) specific energies. Using an atomic force microscope, images were obtained and a comparison of the surface topography before and after cluster ion bombardment was conducted. The smoothing of the surface was demonstrated using the power spectral density function of roughness in the range of spatial frequencies: 1) m—for the high-energy mode; 2) m—for the low-energy mode.",

keywords = "cluster ion beam, power spectral density function of roughness, single-crystal germanium, surface smoothing, surface treatment",

author = "Nikolaev, {I. V.} and Korobeishchikov, {N. G.} and Lapega, {A. V.}",

note = "The study was supported by the Russian Science Foundation, project no. 23-79-10061 (https://rscf.ru/project/23-79-10061/) and was carried out using the equipment of the Center for Collective Use “Applied Physics” at the Novosibirsk State University.",

year = "2024",

month = jun,

doi = "10.3103/S0027134924700462",

language = "English",

volume = "79",

pages = "330--335",

journal = "Moscow University Physics Bulletin (English Translation of Vestnik Moskovskogo Universiteta, Fizika)",

issn = "0027-1349",

publisher = "Allerton Press Inc.",

number = "3",

}

RIS

TY - JOUR

T1 - Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers

AU - Nikolaev, I. V.

AU - Korobeishchikov, N. G.

AU - Lapega, A. V.

N1 - The study was supported by the Russian Science Foundation, project no. 23-79-10061 (https://rscf.ru/project/23-79-10061/) and was carried out using the equipment of the Center for Collective Use “Applied Physics” at the Novosibirsk State University.

PY - 2024/6

Y1 - 2024/6

N2 - The surface treatment of single-crystal germanium with an argon cluster ion beam has been investigated. The original surface of the germanium wafers was bombarded with argon cluster ions with high (105 eV/atom) and low (10 eV/atom) specific energies. Using an atomic force microscope, images were obtained and a comparison of the surface topography before and after cluster ion bombardment was conducted. The smoothing of the surface was demonstrated using the power spectral density function of roughness in the range of spatial frequencies: 1) m—for the high-energy mode; 2) m—for the low-energy mode.

AB - The surface treatment of single-crystal germanium with an argon cluster ion beam has been investigated. The original surface of the germanium wafers was bombarded with argon cluster ions with high (105 eV/atom) and low (10 eV/atom) specific energies. Using an atomic force microscope, images were obtained and a comparison of the surface topography before and after cluster ion bombardment was conducted. The smoothing of the surface was demonstrated using the power spectral density function of roughness in the range of spatial frequencies: 1) m—for the high-energy mode; 2) m—for the low-energy mode.

KW - cluster ion beam

KW - power spectral density function of roughness

KW - single-crystal germanium

KW - surface smoothing

KW - surface treatment

UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85201375964&origin=inward&txGid=a6a25977ea1f4d53d01d10f926a9db00

UR - https://www.elibrary.ru/item.asp?id=68583644

UR - https://www.mendeley.com/catalogue/97ff45f7-765c-3f2a-a593-63949de1a578/

U2 - 10.3103/S0027134924700462

DO - 10.3103/S0027134924700462

M3 - Article

VL - 79

SP - 330

EP - 335

JO - Moscow University Physics Bulletin (English Translation of Vestnik Moskovskogo Universiteta, Fizika)

JF - Moscow University Physics Bulletin (English Translation of Vestnik Moskovskogo Universiteta, Fizika)

SN - 0027-1349

IS - 3

ER -

ID: 60513651