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Determination of the oxygen content in amorphous SiO x thin films. / Zamchiy, A. O.; Baranov, E. A.; Merkulova, I. E. et al.

In: Journal of Non-Crystalline Solids, Vol. 518, 15.08.2019, p. 43-50.

Research output: Contribution to journalArticlepeer-review

Harvard

Zamchiy, AO, Baranov, EA, Merkulova, IE, Khmel, SY & Maximovskiy, EA 2019, 'Determination of the oxygen content in amorphous SiO x thin films', Journal of Non-Crystalline Solids, vol. 518, pp. 43-50. https://doi.org/10.1016/j.jnoncrysol.2019.05.015

APA

Zamchiy, A. O., Baranov, E. A., Merkulova, I. E., Khmel, S. Y., & Maximovskiy, E. A. (2019). Determination of the oxygen content in amorphous SiO x thin films. Journal of Non-Crystalline Solids, 518, 43-50. https://doi.org/10.1016/j.jnoncrysol.2019.05.015

Vancouver

Zamchiy AO, Baranov EA, Merkulova IE, Khmel SY, Maximovskiy EA. Determination of the oxygen content in amorphous SiO x thin films. Journal of Non-Crystalline Solids. 2019 Aug 15;518:43-50. doi: 10.1016/j.jnoncrysol.2019.05.015

Author

Zamchiy, A. O. ; Baranov, E. A. ; Merkulova, I. E. et al. / Determination of the oxygen content in amorphous SiO x thin films. In: Journal of Non-Crystalline Solids. 2019 ; Vol. 518. pp. 43-50.

BibTeX

@article{ac6c56e9e5334e2da157eed3594e636e,
title = "Determination of the oxygen content in amorphous SiO x thin films",
abstract = " The bonding structure and composition of amorphous silicon suboxide (a-SiO x , 0.25 < x < 0.75) thin films deposited by gas-jet electron beam plasma chemical vapor deposition were studied by Fourier transform infrared (FTIR) spectroscopy, Rutherford backscattering spectroscopy (RBS), and wavelength dispersive X-ray spectroscopy (WDS). Based on the dependence of the integrated absorption of the Si-O-Si asymmetric stretching modes normalized to the silicon atomic density on the x values evaluated by RBS, the proportionality coefficient A SiO of the Si-O-Si asymmetric stretching modes was determined to be 2 × 10 19 cm −2 . Details of the A SiO calculation, the dependence of the silicon atomic density on x, and the limits of integration were discussed. The significant overestimation of the x values obtained from the Si-O-Si stretching mode position in the IR spectra of the films in comparison with the actual values and the presence of a high-frequency shoulder centered at ~ 1140 cm −1 in the IR spectra indicates the inhomogeneity of the structure of the films. At the same time, the parameters of the Si-O-Si asymmetric stretching band (position and full width at half maximum) indicate the absence of a strict phase separation in the structure of the synthesized films, which are thus described by the intermediate model. ",
keywords = "Fourier transform infrared spectroscopy, Oxygen concentration, Rutherford backscattering spectroscopy, Silicon suboxide, Stoichiometric coefficient, Wavelength dispersive X-ray spectroscopy, HIGH GROWTH-RATE, DEFECTS, SILICON FILMS, DEPOSITION, OPTICAL-PROPERTIES, OPTOELECTRONIC PROPERTIES, GLOW-DISCHARGE, LAYERS, EVOLUTION, ABSORPTION",
author = "Zamchiy, {A. O.} and Baranov, {E. A.} and Merkulova, {I. E.} and Khmel, {S. Ya} and Maximovskiy, {E. A.}",
note = "Publisher Copyright: {\textcopyright} 2019 Elsevier B.V.",
year = "2019",
month = aug,
day = "15",
doi = "10.1016/j.jnoncrysol.2019.05.015",
language = "English",
volume = "518",
pages = "43--50",
journal = "Journal of Non-Crystalline Solids",
issn = "0022-3093",
publisher = "Elsevier",

}

RIS

TY - JOUR

T1 - Determination of the oxygen content in amorphous SiO x thin films

AU - Zamchiy, A. O.

AU - Baranov, E. A.

AU - Merkulova, I. E.

AU - Khmel, S. Ya

AU - Maximovskiy, E. A.

N1 - Publisher Copyright: © 2019 Elsevier B.V.

PY - 2019/8/15

Y1 - 2019/8/15

N2 - The bonding structure and composition of amorphous silicon suboxide (a-SiO x , 0.25 < x < 0.75) thin films deposited by gas-jet electron beam plasma chemical vapor deposition were studied by Fourier transform infrared (FTIR) spectroscopy, Rutherford backscattering spectroscopy (RBS), and wavelength dispersive X-ray spectroscopy (WDS). Based on the dependence of the integrated absorption of the Si-O-Si asymmetric stretching modes normalized to the silicon atomic density on the x values evaluated by RBS, the proportionality coefficient A SiO of the Si-O-Si asymmetric stretching modes was determined to be 2 × 10 19 cm −2 . Details of the A SiO calculation, the dependence of the silicon atomic density on x, and the limits of integration were discussed. The significant overestimation of the x values obtained from the Si-O-Si stretching mode position in the IR spectra of the films in comparison with the actual values and the presence of a high-frequency shoulder centered at ~ 1140 cm −1 in the IR spectra indicates the inhomogeneity of the structure of the films. At the same time, the parameters of the Si-O-Si asymmetric stretching band (position and full width at half maximum) indicate the absence of a strict phase separation in the structure of the synthesized films, which are thus described by the intermediate model.

AB - The bonding structure and composition of amorphous silicon suboxide (a-SiO x , 0.25 < x < 0.75) thin films deposited by gas-jet electron beam plasma chemical vapor deposition were studied by Fourier transform infrared (FTIR) spectroscopy, Rutherford backscattering spectroscopy (RBS), and wavelength dispersive X-ray spectroscopy (WDS). Based on the dependence of the integrated absorption of the Si-O-Si asymmetric stretching modes normalized to the silicon atomic density on the x values evaluated by RBS, the proportionality coefficient A SiO of the Si-O-Si asymmetric stretching modes was determined to be 2 × 10 19 cm −2 . Details of the A SiO calculation, the dependence of the silicon atomic density on x, and the limits of integration were discussed. The significant overestimation of the x values obtained from the Si-O-Si stretching mode position in the IR spectra of the films in comparison with the actual values and the presence of a high-frequency shoulder centered at ~ 1140 cm −1 in the IR spectra indicates the inhomogeneity of the structure of the films. At the same time, the parameters of the Si-O-Si asymmetric stretching band (position and full width at half maximum) indicate the absence of a strict phase separation in the structure of the synthesized films, which are thus described by the intermediate model.

KW - Fourier transform infrared spectroscopy

KW - Oxygen concentration

KW - Rutherford backscattering spectroscopy

KW - Silicon suboxide

KW - Stoichiometric coefficient

KW - Wavelength dispersive X-ray spectroscopy

KW - HIGH GROWTH-RATE

KW - DEFECTS

KW - SILICON FILMS

KW - DEPOSITION

KW - OPTICAL-PROPERTIES

KW - OPTOELECTRONIC PROPERTIES

KW - GLOW-DISCHARGE

KW - LAYERS

KW - EVOLUTION

KW - ABSORPTION

UR - http://www.scopus.com/inward/record.url?scp=85065720186&partnerID=8YFLogxK

U2 - 10.1016/j.jnoncrysol.2019.05.015

DO - 10.1016/j.jnoncrysol.2019.05.015

M3 - Article

AN - SCOPUS:85065720186

VL - 518

SP - 43

EP - 50

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

SN - 0022-3093

ER -

ID: 20042523