Research output: Contribution to journal › Article › peer-review
| Translated title of the contribution | Features of processing of polycrystalline aln films on glass-ceramics and Si substrates with argon cluster ions |
|---|---|
| Original language | Russian |
| Article number | 7 |
| Pages (from-to) | 46-50 |
| Number of pages | 5 |
| Journal | Поверхность. Рентгеновские, синхротронные и нейтронные исследования |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - 15 Jul 2022 |
ID: 36950240