Research output: Contribution to journal › Article › peer-review
| Translated title of the contribution | Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers |
|---|---|
| Original language | Russian |
| Article number | 2430301 |
| Number of pages | 5 |
| Journal | Вестник Московского университета. Серия 3. Физика. Астрономия |
| Volume | 79 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - Apr 2024 |
ID: 60095545