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  1. 2017

  2. Focus Probe Technique for Edge Detection and Linewidth Measurement of Microstructures with Nanometer Resolution

    Fan, K. C., Lin, C. D., Li, R., Chen, L. C. & Chugui, Y., 1 Jun 2017, In: Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao. 38, 3, p. 253-260 8 p.

    Research output: Contribution to journal › Article › peer-review

  3. 2016

  4. Calculation of the object edge position after its projection in a spatially noninvariant coherent optical system

    Chugui, Y. V., 1 Nov 2016, In: Optoelectronics, Instrumentation and Data Processing. 52, 6, p. 570-579 10 p.

    Research output: Contribution to journal › Article › peer-review

  5. 2015

  6. 3D image formation in transmitted partially coherent and incoherent light applied to dimensional inspection

    Chugui, Y. V. & Senchenko, E. S., 1 Sept 2015, In: International Journal of Automation Technology. 9, 5, p. 508-514 7 p.

    Research output: Contribution to journal › Article › peer-review

  7. Optical measuring and laser technologies for scientific and industrial applications

    Chugui, Y. V., Verkhoglyad, A. G., Zavyalov, P. S., Sysoev, E. V., Kulikov, R. V., Vykhristyuk, I. A., Zavyalova, M. A., Poleshchuk, A. G. & Korolkov, V. P., 1 Sept 2015, In: International Journal of Automation Technology. 9, 5, p. 515-524 10 p.

    Research output: Contribution to journal › Article › peer-review

  8. Three-dimensional optoelectronic measurement systems and laser technologies for scientific and industrial applications

    Chugui, Y. V., 1 Jul 2015, In: Optoelectronics, Instrumentation and Data Processing. 51, 4, p. 385-397 13 p.

    Research output: Contribution to journal › Article › peer-review

  9. Correction of scanning steps to improve accuracy in interferometric profilometer

    Sysoev, E., Kulikov, R., Vykhristyuk, I. & Chugui, Y., 1 Feb 2015, In: Measurement Science Review. 15, 1, p. 9-12 4 p.

    Research output: Contribution to journal › Article › peer-review

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