Correction of scanning steps to improve accuracy in interferometric profilometer › Research Explorer

Novosibirsk State University's Research Portal

Correction of scanning steps to improve accuracy in interferometric profilometer

Research output: Contribution to journal › Article › peer-review

Computer Technology Section

DOI

https://doi.org/10.1515/msr-2015-0002
Final published version

E. Sysoev
R. Kulikov
I. Vykhristyuk
Yu Chugui

Original language	English
Pages (from-to)	9-12
Number of pages	4
Journal	Measurement Science Review
Volume	15
Issue number	1
DOIs	https://doi.org/10.1515/msr-2015-0002
Publication status	Published - 1 Feb 2015

OECD FOS+WOS

Research areas

measurement error, nanorelief measurement, Phase shifting interferometry

ID: 25331804