• Kuang Chao Fan
  • Chi Duen Lin
  • Ruijun Li
  • Liang Chia Chen
  • Yuri Chugui
Original languageEnglish
Pages (from-to)253-260
Number of pages8
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Volume38
Issue number3
Publication statusPublished - 1 Jun 2017
Externally publishedYes

    Research areas

  • Edge detection, Focus probe, Linewidth, Microstructure, METROLOGY, OPTICAL-MICROSCOPE

    OECD FOS+WOS

ID: 25348491