DOI

  • Yuri V. Chugui
  • Alexander G. Verkhoglyad
  • Petr S. Zavyalov
  • Evgeny V. Sysoev
  • Rodion V. Kulikov
  • Ignat A. Vykhristyuk
  • Marina A. Zavyalova
  • Alexander G. Poleshchuk
  • Victor P. Korolkov
Original languageEnglish
Pages (from-to)515-524
Number of pages10
JournalInternational Journal of Automation Technology
Volume9
Issue number5
DOIs
Publication statusPublished - 1 Sept 2015

    OECD FOS+WOS

    Research areas

  • 3D optical inspection, Diffractive optical element, Laser circular image generator, Nano profilometer, Pico resolution

ID: 25331889