Original languageEnglish
Pages (from-to)570-579
Number of pages10
JournalOptoelectronics, Instrumentation and Data Processing
Volume52
Issue number6
DOIs
Publication statusPublished - 1 Nov 2016

    OECD FOS+WOS

    Research areas

  • dimensional inspection, Fourier optics, light diffraction, telecentric projection systems

ID: 25331609