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  1. 2025

  2. Highly textured AlN films deposited by pulsed DC magnetron sputtering with optimized process parameters

    Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Kapishnikov, A. V., Mironova, M. I. & Geydt, P. V., 1 Mar 2025, In: Solid State Communications. 397, 115821.

    Research output: Contribution to journal › Article › peer-review

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ID: 3504746