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  1. 2025

  2. Highly textured AlN films deposited by pulsed DC magnetron sputtering with optimized process parameters

    Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Kapishnikov, A. V., Mironova, M. I. & Geydt, P. V., 1 Mar 2025, In: Solid State Communications. 397, 115821.

    Research output: Contribution to journal › Article › peer-review

  3. Effect of the phase composition of Ca-Al hydroxide precursors on the mayenite formation

    Kapishnikov, A. V., Shuvarakova, E. I., Cherepanova, S. V., Gerasimov, E. Y., Bespalko, Y. N., Maksimovskiy, E. A., Volodin, A. M. & Bedilo, A. F., Sept 2025, In: Ceramics International. 51, 22, p. 35496-35505 10 p.

    Research output: Contribution to journal › Article › peer-review

  4. Effect of substrate temperature on the mechanical stresses in aluminum nitride films prepared by pulsed DC magnetron sputtering

    Шаяпов, В. Р., Богословцева, А. Л., Чепкасов, С. Ю., Капишников, А. В., Milekhin, I., Миронова, М. И. & Гейдт, П. В., 17 Dec 2025, In: Physica Scripta. 100, 12, 9 p., 125935.

    Research output: Contribution to journal › Article › peer-review

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