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  1. Comparative nanopatterning of single-component semiconductors using oblique argon cluster ion bombardment

    Коробейщиков, Н. Г., Николаев, И. В., Стишенко, П. В. & Яковлева, М. В., Dec 2025, In: Materials Science in Semiconductor Processing. 200, 11 p., 110016.

    Research output: Contribution to journal › Article › peer-review

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ID: 28527068