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  1. Aluminium nitride thin films surface smoothing by argon cluster ions

    Korobeishchikov, N., Geydt, P., Nikolaev, I., Strunin, V. & Roenko, M., 14 Sept 2020, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., p. 722-725 4 p. 9242187. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  2. A High-Efficiency Method for Scanning Supersonic Jets of Rarefied Gases

    Yaskin, A. S., Kalyada, V. V., Zarvin, A. E. & Chinenov, S. T., 1 Jul 2020, In: Instruments and Experimental Techniques. 63, 3, p. 430-434 5 p.

    Research output: Contribution to journal › Article › peer-review

  3. Accelerated cluster ion beams for materials processing: XXXI International Conference on Phenomena in Ionized Gases (ICPIG XXXI). Granada, Spain. 14-19 July 2013. Proceedings. PS2-095.

    Korobeishchikov, N. G., Kalyada, V. V., Zarvin, A. E. & Shmakov, A. A., 2013.

    Research output: Contribution to conference › Paper › peer-review

  4. Abnormal excitation of argon radiation upon electron-beam activation in condensed supersonic jets of mixtures: XXXI International Conference on Phenomena in Ionized Gases (ICPIG XXXI). Granada, Spain. 14-19 July 2013. Proceedings. PS2-085.

    Madirbaev, V. G., Zarvin, A. E. & Korobeishchikov, N. G., 2013.

    Research output: Contribution to conference › Paper › peer-review

  5. 1.534 µm Er electroluminescence in the RF magnetron deposited In2O3 : Er films on a Si substrate

    Feklistov, K. V., Lemzyakov, A. G., Abramkin, D. S., Svit, K. A., Pugachev, A. M., Volodin, V. A., Marin, D. V., Spesivsev, E. V., Azarov, I. A., Safronov, L. N., Kochubey, S. A., Ershov, K. S., Kapishnikov, A. V., Shmakov, A. N., Shklyaev, A. A. & Zhivodkov, Y. A., 30 Jun 2026, In: Modern Electronic Materials. 12, 2, p. 95-102 8 p.

    Research output: Contribution to journal › Article › peer-review

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