Research output: Contribution to conference › Paper › peer-review
Ultra-smooth surface polishing by argon cluster ion beam : Proc. of the Russia-Japan Conference “Advanced Materials – 2016: Synthesis, Processing and Properties of Nanostructures”. Oct. 30th – Nov. 3rd, 2016 / Novosibirsk State University. – Novosibirsk. 2016 – p. 104. ISBN 978-5-4437-0570-5. . / Коробейщиков, Николай Геннадьевич; Николаев, Иван Владимирович; Роенко, Максим Анатольевич et al.
2016. 104.Research output: Contribution to conference › Paper › peer-review
}
TY - CONF
T1 - Ultra-smooth surface polishing by argon cluster ion beam
T2 - Proc. of the Russia-Japan Conference “Advanced Materials – 2016: Synthesis, Processing and Properties of Nanostructures”. Oct. 30th – Nov. 3rd, 2016 / Novosibirsk State University. – Novosibirsk. 2016 – p. 104. ISBN 978-5-4437-0570-5.
AU - Коробейщиков, Николай Геннадьевич
AU - Николаев, Иван Владимирович
AU - Роенко, Максим Анатольевич
AU - Каляда, Валерий Владимирович
PY - 2016
Y1 - 2016
M3 - Paper
SP - 104
ER -
ID: 27269285