Swift heavy ion stimulated formation of the Si quantum dots in Si/SiO 2 multilayer heterostructures › Research Explorer

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Swift heavy ion stimulated formation of the Si quantum dots in Si/SiO ₂ multilayer heterostructures

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

DOI

https://doi.org/10.1117/12.2522161
Final published version

G. N. Kamaev
S. G. Cherkova
A. A. Gismatulin
V. A. Volodin
V. A. Skuratov

Original language	English
Title of host publication	International Conference on Micro- and Nano-Electronics 2018
Editors	Vladimir F. Lukichev, Konstantin V. Rudenko
Publisher	SPIE
Number of pages	6
Volume	11022
ISBN (Electronic)	9781510627093
DOIs	https://doi.org/10.1117/12.2522161
Publication status	Published - 1 Jan 2019
Event	International Conference on Micro- and Nano-Electronics 2018, ICMNE 2018 - Zvenigorod, Russian Federation Duration: 1 Oct 2018 → 5 Oct 2018

Publication series

Name	Proceedings of SPIE
Publisher	SPIE-INT SOC OPTICAL ENGINEERING
Volume	11022
ISSN (Print)	0277-786X

Conference

Conference	International Conference on Micro- and Nano-Electronics 2018, ICMNE 2018
Country/Territory	Russian Federation
City	Zvenigorod
Period	01.10.2018 → 05.10.2018

Research areas

memristors, multilayer structures, silicon nanocrystals, swift heavy ions, IRRADIATION, SUPERLATTICE, PHOTOLUMINESCENCE, SILICON NANOCRYSTALS

ID: 19040011