Standard

Surface smoothing of polycrystalline AlN thin films by argon cluster ions : 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): . / Коробейщиков, Николай Геннадьевич; Николаев, Иван Владимирович; Роенко, Максим Анатольевич et al.

Surface smoothing of polycrystalline AlN thin films by argon cluster ions : 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): Abstracts. . Томск, 2020. p. 256.

Research output: Chapter in Book/Report/Conference proceeding › Article in an anthology › peer-review

Harvard

Коробейщиков, НГ, Николаев, ИВ, Роенко, МА, Гейдт, ПВ & Струнин, ВИ 2020, Surface smoothing of polycrystalline AlN thin films by argon cluster ions: 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): . in Surface smoothing of polycrystalline AlN thin films by argon cluster ions : 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): Abstracts. . Томск, pp. 256.

APA

Коробейщиков, Н. Г., Николаев, И. В., Роенко, М. А., Гейдт, П. В., & Струнин, В. И. (2020). Surface smoothing of polycrystalline AlN thin films by argon cluster ions: 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): . In Surface smoothing of polycrystalline AlN thin films by argon cluster ions : 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): Abstracts. (pp. 256).

Vancouver

Коробейщиков НГ, Николаев ИВ, Роенко МА, Гейдт ПВ, Струнин ВИ. Surface smoothing of polycrystalline AlN thin films by argon cluster ions: 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): . In Surface smoothing of polycrystalline AlN thin films by argon cluster ions : 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): Abstracts. . Томск. 2020. p. 256

Author

Коробейщиков, Николай Геннадьевич ; Николаев, Иван Владимирович ; Роенко, Максим Анатольевич et al. / Surface smoothing of polycrystalline AlN thin films by argon cluster ions : 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): . Surface smoothing of polycrystalline AlN thin films by argon cluster ions : 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): Abstracts. . Томск, 2020. pp. 256

BibTeX

@inbook{3e9ec4dcaeea49039be202fb301b53e9,
title = "Surface smoothing of polycrystalline AlN thin films by argon cluster ions: 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): ",
author = "Коробейщиков, {Николай Геннадьевич} and Николаев, {Иван Владимирович} and Роенко, {Максим Анатольевич} and Гейдт, {Павел Викторович} and В.И. Струнин",
year = "2020",
language = "English",
isbn = "978-5-94458-182-2",
pages = "256",
booktitle = "Surface smoothing of polycrystalline AlN thin films by argon cluster ions",

}

RIS

TY - CHAP

T1 - Surface smoothing of polycrystalline AlN thin films by argon cluster ions

T2 - 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020):

AU - Коробейщиков, Николай Геннадьевич

AU - Николаев, Иван Владимирович

AU - Роенко, Максим Анатольевич

AU - Гейдт, Павел Викторович

AU - Струнин, В.И.

PY - 2020

Y1 - 2020

M3 - Article in an anthology

SN - 978-5-94458-182-2

SP - 256

BT - Surface smoothing of polycrystalline AlN thin films by argon cluster ions

CY - Томск

ER -

ID: 27173325