• D. V. Dmitriev
  • D. A. Kolosovsky
  • E. V. Fedosenko
  • A. I. Toropov
  • K. S. Zhuravlev
Original languageEnglish
Pages (from-to)823-827
Number of pages5
JournalSemiconductors
Volume55
Issue number11
DOIs
Publication statusPublished - Nov 2021

    Research areas

  • annealing, arsenic, diffraction, indium phosphide, substitution

    OECD FOS+WOS

  • 2.05 MATERIALS ENGINEERING
  • 1.03 PHYSICAL SCIENCES AND ASTRONOMY

ID: 35550921