Raman scattering study of nanoscale Mo/Si and Mo/Be periodic multilayer structures

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	063408
Number of pages	7
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	38
Issue number	6
DOIs	https://doi.org/10.1116/6.0000408
Publication status	Published - 1 Dec 2020

SOFT-X-RAY, PHASE-FORMATION, A-SI, MIRRORS, BERYLLIUM, SPECTRA, REFLECTIVITY, BARRIER, MICROSTRUCTURE, LITHOGRAPHY

ID: 25862386