Research output: Contribution to journal › Article › peer-review
| Original language | English |
|---|---|
| Pages (from-to) | S84-S91 |
| Number of pages | 8 |
| Journal | Russian Microelectronics |
| Volume | 52 |
| Issue number | Suppl 1 |
| DOIs | |
| Publication status | Published - Dec 2023 |
ID: 59888365