Kinetics of gold-induced layer exchange crystallization of amorphous silicon suboxide films: Experimental and theoretical study

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Kinetics of gold-induced layer exchange crystallization of amorphous silicon suboxide films: Experimental and theoretical study. / Zamchiy, A. O.; Vorobyov, Y. V.; Lunev, N. A. et al.

In: Journal of Alloys and Compounds, Vol. 939, 168818, 05.04.2023.

Research output: Contribution to journal › Article › peer-review

BibTeX

@article{98a5d540871a4c2ab88b41836b8fd375,

title = "Kinetics of gold-induced layer exchange crystallization of amorphous silicon suboxide films: Experimental and theoretical study",

abstract = "The kinetics of gold-induced crystallization (AuIC) of amorphous silicon suboxide (a-SiOx, x = 0.2) films in the layer exchange mode was detailed studied by variation of the annealing temperature in the range of 220–250 °C for the first time. In situ optical microscopy performed during annealing made it possible to study the processes of the nucleation and the growth of Si crystal structures. A decrease in the nucleation rate during annealing was shown, which is probably associated with coarsening of grains in the Au film which is confirmed by scanning electron microscopy. Obtained experimental data along with the simulations carried out within the framework of the Kolmogorov–Johnson–Mehl–Avrami (KJMA) theory made it possible for the first time to obtain the values of the activation energies for the nucleation, the growth, as well as the overall process of AuIC of a-SiO0.2 which amounted to 2.51 ± 0.80, 0.31 ± 0.10, and 1.62 ± 0.15 eV, respectively.",

keywords = "Activation energy, Gold-induced crystallization, KJMA model, Kinetic parameters, Polycrystalline silicon, Silicon suboxide",

author = "Zamchiy, {A. O.} and Vorobyov, {Y. V.} and Lunev, {N. A.} and Konstantinov, {V. O.} and Sakhapov, {S. Z.} and Maximovskiy, {E. A.} and Baranov, {E. A.}",

note = "This study was financially supported by the Russian Science Foundation , project # 22-79-10079 , ( https://rscf.ru/project/22-79-10079/ ). The simulation of crystallization process was funded by the Council on grants of the President of the Russian Federation (no. MK-1155.2021.1.3 ). The study of the optical properties of films was carried out under state contract with IT SB RAS , project No. 121031800218–5 .",

year = "2023",

month = apr,

day = "5",

doi = "10.1016/j.jallcom.2023.168818",

language = "English",

volume = "939",

journal = "Journal of Alloys and Compounds",

issn = "0925-8388",

publisher = "Elsevier",

}

RIS

TY - JOUR

T1 - Kinetics of gold-induced layer exchange crystallization of amorphous silicon suboxide films: Experimental and theoretical study

AU - Zamchiy, A. O.

AU - Vorobyov, Y. V.

AU - Lunev, N. A.

AU - Konstantinov, V. O.

AU - Sakhapov, S. Z.

AU - Maximovskiy, E. A.

AU - Baranov, E. A.

N1 - This study was financially supported by the Russian Science Foundation , project # 22-79-10079 , ( https://rscf.ru/project/22-79-10079/ ). The simulation of crystallization process was funded by the Council on grants of the President of the Russian Federation (no. MK-1155.2021.1.3 ). The study of the optical properties of films was carried out under state contract with IT SB RAS , project No. 121031800218–5 .

PY - 2023/4/5

Y1 - 2023/4/5

N2 - The kinetics of gold-induced crystallization (AuIC) of amorphous silicon suboxide (a-SiOx, x = 0.2) films in the layer exchange mode was detailed studied by variation of the annealing temperature in the range of 220–250 °C for the first time. In situ optical microscopy performed during annealing made it possible to study the processes of the nucleation and the growth of Si crystal structures. A decrease in the nucleation rate during annealing was shown, which is probably associated with coarsening of grains in the Au film which is confirmed by scanning electron microscopy. Obtained experimental data along with the simulations carried out within the framework of the Kolmogorov–Johnson–Mehl–Avrami (KJMA) theory made it possible for the first time to obtain the values of the activation energies for the nucleation, the growth, as well as the overall process of AuIC of a-SiO0.2 which amounted to 2.51 ± 0.80, 0.31 ± 0.10, and 1.62 ± 0.15 eV, respectively.

AB - The kinetics of gold-induced crystallization (AuIC) of amorphous silicon suboxide (a-SiOx, x = 0.2) films in the layer exchange mode was detailed studied by variation of the annealing temperature in the range of 220–250 °C for the first time. In situ optical microscopy performed during annealing made it possible to study the processes of the nucleation and the growth of Si crystal structures. A decrease in the nucleation rate during annealing was shown, which is probably associated with coarsening of grains in the Au film which is confirmed by scanning electron microscopy. Obtained experimental data along with the simulations carried out within the framework of the Kolmogorov–Johnson–Mehl–Avrami (KJMA) theory made it possible for the first time to obtain the values of the activation energies for the nucleation, the growth, as well as the overall process of AuIC of a-SiO0.2 which amounted to 2.51 ± 0.80, 0.31 ± 0.10, and 1.62 ± 0.15 eV, respectively.

KW - Activation energy

KW - Gold-induced crystallization

KW - KJMA model

KW - Kinetic parameters

KW - Polycrystalline silicon

KW - Silicon suboxide

UR - https://www.scopus.com/inward/record.url?eid=2-s2.0-85146177825&partnerID=40&md5=c39b9fbe6e3971f76690f928ed872a02

UR - https://www.mendeley.com/catalogue/27dd254f-5d53-3174-8c40-151a67351c29/

U2 - 10.1016/j.jallcom.2023.168818

DO - 10.1016/j.jallcom.2023.168818

M3 - Article

VL - 939

JO - Journal of Alloys and Compounds

JF - Journal of Alloys and Compounds

SN - 0925-8388

M1 - 168818

ER -

ID: 49133656