Kinetics of gold-induced layer exchange crystallization of amorphous silicon suboxide films: Experimental and theoretical study

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	168818
Journal	Journal of Alloys and Compounds
Volume	939
DOIs	https://doi.org/10.1016/j.jallcom.2023.168818
Publication status	Published - 5 Apr 2023

Activation energy, Gold-induced crystallization, KJMA model, Kinetic parameters, Polycrystalline silicon, Silicon suboxide

ID: 49133656