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Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions. / Korobeishchikov, N. G.; Nikolaev, I. V.; Roenko, M. A.

In: Technical Physics Letters, Vol. 45, No. 3, 01.03.2019, p. 274-277.

Research output: Contribution to journal › Article › peer-review

Harvard

Korobeishchikov, NG, Nikolaev, IV & Roenko, MA 2019, 'Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions', Technical Physics Letters, vol. 45, no. 3, pp. 274-277. https://doi.org/10.1134/S1063785019030295

APA

Korobeishchikov, N. G., Nikolaev, I. V., & Roenko, M. A. (2019). Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions. Technical Physics Letters, 45(3), 274-277. https://doi.org/10.1134/S1063785019030295

Vancouver

Korobeishchikov NG, Nikolaev IV, Roenko MA. Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions. Technical Physics Letters. 2019 Mar 1;45(3):274-277. doi: 10.1134/S1063785019030295

Author

Korobeishchikov, N. G. ; Nikolaev, I. V. ; Roenko, M. A. / Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions. In: Technical Physics Letters. 2019 ; Vol. 45, No. 3. pp. 274-277.

BibTeX

@article{8adbeb724993466587e39061048ef59f,
title = "Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions",
abstract = " Abstract: It is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies (ν = 0.2–100 μm –1 ). ",
keywords = "BEAM, SIZE",
author = "Korobeishchikov, {N. G.} and Nikolaev, {I. V.} and Roenko, {M. A.}",
year = "2019",
month = mar,
day = "1",
doi = "10.1134/S1063785019030295",
language = "English",
volume = "45",
pages = "274--277",
journal = "Technical Physics Letters",
issn = "1063-7850",
publisher = "PLEIADES PUBLISHING INC",
number = "3",

}

RIS

TY - JOUR

T1 - Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions

AU - Korobeishchikov, N. G.

AU - Nikolaev, I. V.

AU - Roenko, M. A.

PY - 2019/3/1

Y1 - 2019/3/1

N2 - Abstract: It is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies (ν = 0.2–100 μm –1 ).

AB - Abstract: It is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies (ν = 0.2–100 μm –1 ).

KW - BEAM

KW - SIZE

UR - http://www.scopus.com/inward/record.url?scp=85065301844&partnerID=8YFLogxK

U2 - 10.1134/S1063785019030295

DO - 10.1134/S1063785019030295

M3 - Article

AN - SCOPUS:85065301844

VL - 45

SP - 274

EP - 277

JO - Technical Physics Letters

JF - Technical Physics Letters

SN - 1063-7850

IS - 3

ER -

ID: 20038059