TY - JOUR

T1 - Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions

AU - Korobeishchikov, N. G.

AU - Nikolaev, I. V.

AU - Roenko, M. A.

PY - 2019/3/1

Y1 - 2019/3/1

N2 - Abstract: It is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies (ν = 0.2–100 μm –1 ).

AB - Abstract: It is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies (ν = 0.2–100 μm –1 ).

KW - BEAM

KW - SIZE

UR - http://www.scopus.com/inward/record.url?scp=85065301844&partnerID=8YFLogxK

U2 - 10.1134/S1063785019030295

DO - 10.1134/S1063785019030295

M3 - Article

AN - SCOPUS:85065301844

VL - 45

SP - 274

EP - 277

JO - Technical Physics Letters

JF - Technical Physics Letters

SN - 1063-7850

IS - 3

ER -