Research output: Contribution to journal › Article › peer-review
| Translated title of the contribution | Эллипсометрические in situ методы контроля температуры в технологии выращивания слоёв МЛЭ КРТ |
|---|---|
| Original language | English |
| Article number | 5 |
| Pages (from-to) | 476-484 |
| Number of pages | 9 |
| Journal | Optoelectronics, Instrumentation and Data Processing |
| Volume | 57 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - Sept 2021 |
ID: 35771128