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Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface. / Milakhin, Denis; Malin, Timur; Mansurov, Vladimir et al.

In: Physica Status Solidi (B) Basic Research, Vol. 256, No. 6, 1800516, 01.06.2019.

Research output: Contribution to journal › Article › peer-review

Harvard

Milakhin, D, Malin, T, Mansurov, V, Galitsyn, Y & Zhuravlev, K 2019, 'Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface', Physica Status Solidi (B) Basic Research, vol. 256, no. 6, 1800516. https://doi.org/10.1002/pssb.201800516

APA

Milakhin, D., Malin, T., Mansurov, V., Galitsyn, Y., & Zhuravlev, K. (2019). Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface. Physica Status Solidi (B) Basic Research, 256(6), [1800516]. https://doi.org/10.1002/pssb.201800516

Vancouver

Milakhin D, Malin T, Mansurov V, Galitsyn Y, Zhuravlev K. Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface. Physica Status Solidi (B) Basic Research. 2019 Jun 1;256(6):1800516. doi: 10.1002/pssb.201800516

Author

Milakhin, Denis ; Malin, Timur ; Mansurov, Vladimir et al. / Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface. In: Physica Status Solidi (B) Basic Research. 2019 ; Vol. 256, No. 6.

BibTeX

@article{ab7d5efdc00746c7859de69be98e308b,
title = "Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface",
abstract = "The effect of a high-energy electron beam (11 keV) on the (0001) sapphire nitridation process is investigated. The high-energy electrons accelerate more than an order of magnitude the sapphire nitridation process. The effect is due to an increase of the Al and N atom concentrations on the sapphire surface caused by the electron-stimulated desorption of oxygen atoms and electron-stimulated decomposition of ammonia molecules.",
keywords = "ammonia-MBE, electron-stimulated processes, III-nitrides, nitridation, reflection high-energy electron diffraction (RHEED), reflection high-energy electron diffraction (RH EED), AL2O3 SURFACE, ADSORPTION, EPITAXY, DESORPTION, GAN, SUBSTRATE, GROWTH, STRUCTURAL-PROPERTIES",
author = "Denis Milakhin and Timur Malin and Vladimir Mansurov and Yury Galitsyn and Konstantin Zhuravlev",
year = "2019",
month = jun,
day = "1",
doi = "10.1002/pssb.201800516",
language = "English",
volume = "256",
journal = "Physica Status Solidi (B): Basic Research",
issn = "0370-1972",
publisher = "Wiley-VCH Verlag",
number = "6",

}

RIS

TY - JOUR

T1 - Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface

AU - Milakhin, Denis

AU - Malin, Timur

AU - Mansurov, Vladimir

AU - Galitsyn, Yury

AU - Zhuravlev, Konstantin

PY - 2019/6/1

Y1 - 2019/6/1

N2 - The effect of a high-energy electron beam (11 keV) on the (0001) sapphire nitridation process is investigated. The high-energy electrons accelerate more than an order of magnitude the sapphire nitridation process. The effect is due to an increase of the Al and N atom concentrations on the sapphire surface caused by the electron-stimulated desorption of oxygen atoms and electron-stimulated decomposition of ammonia molecules.

AB - The effect of a high-energy electron beam (11 keV) on the (0001) sapphire nitridation process is investigated. The high-energy electrons accelerate more than an order of magnitude the sapphire nitridation process. The effect is due to an increase of the Al and N atom concentrations on the sapphire surface caused by the electron-stimulated desorption of oxygen atoms and electron-stimulated decomposition of ammonia molecules.

KW - ammonia-MBE

KW - electron-stimulated processes

KW - III-nitrides

KW - nitridation

KW - reflection high-energy electron diffraction (RHEED)

KW - reflection high-energy electron diffraction (RH EED)

KW - AL2O3 SURFACE

KW - ADSORPTION

KW - EPITAXY

KW - DESORPTION

KW - GAN

KW - SUBSTRATE

KW - GROWTH

KW - STRUCTURAL-PROPERTIES

UR - http://www.scopus.com/inward/record.url?scp=85061570071&partnerID=8YFLogxK

U2 - 10.1002/pssb.201800516

DO - 10.1002/pssb.201800516

M3 - Article

AN - SCOPUS:85061570071

VL - 256

JO - Physica Status Solidi (B): Basic Research

JF - Physica Status Solidi (B): Basic Research

SN - 0370-1972

IS - 6

M1 - 1800516

ER -

ID: 18562084