Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface. / Milakhin, Denis; Malin, Timur; Mansurov, Vladimir и др.
в: Physica Status Solidi (B) Basic Research, Том 256, № 6, 1800516, 01.06.2019.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface
AU - Milakhin, Denis
AU - Malin, Timur
AU - Mansurov, Vladimir
AU - Galitsyn, Yury
AU - Zhuravlev, Konstantin
PY - 2019/6/1
Y1 - 2019/6/1
N2 - The effect of a high-energy electron beam (11 keV) on the (0001) sapphire nitridation process is investigated. The high-energy electrons accelerate more than an order of magnitude the sapphire nitridation process. The effect is due to an increase of the Al and N atom concentrations on the sapphire surface caused by the electron-stimulated desorption of oxygen atoms and electron-stimulated decomposition of ammonia molecules.
AB - The effect of a high-energy electron beam (11 keV) on the (0001) sapphire nitridation process is investigated. The high-energy electrons accelerate more than an order of magnitude the sapphire nitridation process. The effect is due to an increase of the Al and N atom concentrations on the sapphire surface caused by the electron-stimulated desorption of oxygen atoms and electron-stimulated decomposition of ammonia molecules.
KW - ammonia-MBE
KW - electron-stimulated processes
KW - III-nitrides
KW - nitridation
KW - reflection high-energy electron diffraction (RHEED)
KW - reflection high-energy electron diffraction (RH EED)
KW - AL2O3 SURFACE
KW - ADSORPTION
KW - EPITAXY
KW - DESORPTION
KW - GAN
KW - SUBSTRATE
KW - GROWTH
KW - STRUCTURAL-PROPERTIES
UR - http://www.scopus.com/inward/record.url?scp=85061570071&partnerID=8YFLogxK
U2 - 10.1002/pssb.201800516
DO - 10.1002/pssb.201800516
M3 - Article
AN - SCOPUS:85061570071
VL - 256
JO - Physica Status Solidi (B): Basic Research
JF - Physica Status Solidi (B): Basic Research
SN - 0370-1972
IS - 6
M1 - 1800516
ER -
ID: 18562084