Electron-Stimulated Aluminum Nitride Crystalline Phase Formation on the Sapphire Surface

Original language	English
Article number	1800516
Number of pages	5
Journal	Physica Status Solidi (B) Basic Research
Volume	256
Issue number	6
DOIs	https://doi.org/10.1002/pssb.201800516
Publication status	Published - 1 Jun 2019

ammonia-MBE, electron-stimulated processes, III-nitrides, nitridation, reflection high-energy electron diffraction (RHEED), reflection high-energy electron diffraction (RH EED), AL2O3 SURFACE, ADSORPTION, EPITAXY, DESORPTION, GAN, SUBSTRATE, GROWTH, STRUCTURAL-PROPERTIES

ID: 18562084