Electronic structure and nanoscale potential fluctuations in strongly nonstoichiometric PECVD SiOx

Original language	English
Article number	119796
Number of pages	4
Journal	Journal of Non-Crystalline Solids
Volume	529
DOIs	https://doi.org/10.1016/j.jnoncrysol.2019.119796
Publication status	Published - 1 Feb 2020

Dielectric, FTIR, HRTEM, PECVD, Raman scattering, SiO, XPS, RAMAN-SPECTRA, SILICON QUANTUM DOTS, AMORPHOUS SI, QUANTITATIVE-ANALYSIS, HYDROGEN, SiO2

ID: 22837979