Effect of deposition conditions on the thermal stability of Ge layers on SiO2 and their dewetting behavior › Research Explorer

DOI

https://doi.org/10.1016/j.tsf.2019.137681
Final published version

C. Dabard
A. A. Shklyaev
V. A. Armbrister
A. L. Aseev

Original language	English
Article number	137681
Number of pages	7
Journal	Thin Solid Films
Volume	693
DOIs	https://doi.org/10.1016/j.tsf.2019.137681
Publication status	Published - 1 Jan 2020

OECD FOS+WOS

2.05 MATERIALS ENGINEERING

Research areas

Electron beam evaporation, Germanium, Knudsen cell, Liquid-state dewetting, Silicon dioxide, Solid-state dewetting, Surface morphology

ID: 22427013