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Effect of argon cluster ion beam on fused silica surface morphology. / Korobeishchikov, N. G.; Nikolaev, I. V.; Roenko, M. A.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 438, 01.01.2019, p. 1-5.

Research output: Contribution to journal › Article › peer-review

Harvard

Korobeishchikov, NG, Nikolaev, IV & Roenko, MA 2019, 'Effect of argon cluster ion beam on fused silica surface morphology', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 438, pp. 1-5. https://doi.org/10.1016/j.nimb.2018.10.019

APA

Korobeishchikov, N. G., Nikolaev, I. V., & Roenko, M. A. (2019). Effect of argon cluster ion beam on fused silica surface morphology. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 438, 1-5. https://doi.org/10.1016/j.nimb.2018.10.019

Vancouver

Korobeishchikov NG, Nikolaev IV, Roenko MA. Effect of argon cluster ion beam on fused silica surface morphology. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2019 Jan 1;438:1-5. doi: 10.1016/j.nimb.2018.10.019

Author

Korobeishchikov, N. G. ; Nikolaev, I. V. ; Roenko, M. A. / Effect of argon cluster ion beam on fused silica surface morphology. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2019 ; Vol. 438. pp. 1-5.

BibTeX

@article{83059d767a444adfafbadcb1152023a6,
title = "Effect of argon cluster ion beam on fused silica surface morphology",
abstract = "The gas cluster ion bombardment technique is promising for low-damage surface smoothing of optical materials. In this work, the morphology evolution of fused silica surfaces during argon cluster ion beam processing was investigated. To characterize the surface roughness, power spectral density functions (PSD) were obtained from a wide spatial frequency range of measurements. The power spectral density function dependencies on the depth of the removed material and cluster ion parameters are shown. Based on the experimental results, it is demonstrated that the use of gas clusters of different sizes and specific energy allows a fused silica surface to be smoothed in the middle spatial frequency (0.01–1 μm−1) and high spatial frequency (1–100 μm−1) ranges.",
keywords = "Cluster ion beam, Fused silica, Mean cluster size, Power spectral density roughness, Surface smoothing, ENERGY, OPTICAL-SURFACES, ROUGHNESS",
author = "Korobeishchikov, {N. G.} and Nikolaev, {I. V.} and Roenko, {M. A.}",
year = "2019",
month = jan,
day = "1",
doi = "10.1016/j.nimb.2018.10.019",
language = "English",
volume = "438",
pages = "1--5",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",

}

RIS

TY - JOUR

T1 - Effect of argon cluster ion beam on fused silica surface morphology

AU - Korobeishchikov, N. G.

AU - Nikolaev, I. V.

AU - Roenko, M. A.

PY - 2019/1/1

Y1 - 2019/1/1

N2 - The gas cluster ion bombardment technique is promising for low-damage surface smoothing of optical materials. In this work, the morphology evolution of fused silica surfaces during argon cluster ion beam processing was investigated. To characterize the surface roughness, power spectral density functions (PSD) were obtained from a wide spatial frequency range of measurements. The power spectral density function dependencies on the depth of the removed material and cluster ion parameters are shown. Based on the experimental results, it is demonstrated that the use of gas clusters of different sizes and specific energy allows a fused silica surface to be smoothed in the middle spatial frequency (0.01–1 μm−1) and high spatial frequency (1–100 μm−1) ranges.

AB - The gas cluster ion bombardment technique is promising for low-damage surface smoothing of optical materials. In this work, the morphology evolution of fused silica surfaces during argon cluster ion beam processing was investigated. To characterize the surface roughness, power spectral density functions (PSD) were obtained from a wide spatial frequency range of measurements. The power spectral density function dependencies on the depth of the removed material and cluster ion parameters are shown. Based on the experimental results, it is demonstrated that the use of gas clusters of different sizes and specific energy allows a fused silica surface to be smoothed in the middle spatial frequency (0.01–1 μm−1) and high spatial frequency (1–100 μm−1) ranges.

KW - Cluster ion beam

KW - Fused silica

KW - Mean cluster size

KW - Power spectral density roughness

KW - Surface smoothing

KW - ENERGY

KW - OPTICAL-SURFACES

KW - ROUGHNESS

UR - http://www.scopus.com/inward/record.url?scp=85055171832&partnerID=8YFLogxK

U2 - 10.1016/j.nimb.2018.10.019

DO - 10.1016/j.nimb.2018.10.019

M3 - Article

AN - SCOPUS:85055171832

VL - 438

SP - 1

EP - 5

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -

ID: 17247893