Charge Transport Mechanism in Atomic Layer Deposited Oxygen-Deficient TaOx Films

Original language	English
Article number	2000432
Number of pages	6
Journal	Physica Status Solidi (B) Basic Research
Volume	258
Issue number	3
Early online date	27 Oct 2020
DOIs	https://doi.org/10.1002/pssb.202000432
Publication status	Published - Mar 2021

current transport, oxygen vacancies, tantalum oxide, traps, THIN-FILMS, TRAPS, DEVICE, CONDUCTION

ID: 26134121