Charge Transport Mechanism and Trap Origin in Methyl-Terminated Organosilicate Glass Low-κ Dielectrics

Original language	English
Article number	2000654
Number of pages	7
Journal	Physica Status Solidi (A) Applications and Materials Science
Volume	218
Issue number	4
Early online date	11 Dec 2020
DOIs	https://doi.org/10.1002/pssa.202000654
Publication status	Published - Feb 2021

charge transport, density functional theory simulations, low-κ dielectrics, photoluminescence, trap energy, dielectrics, OXYGEN-DEFICIENT CENTERS, DEFECTS, OPTICAL-PROPERTIES, MODEL, DAMAGE, INTERLEVEL, FILMS, LUMINESCENCE, LOW-K DIELECTRICS, CONDUCTION, low-&#954

ID: 27117671