Research output: Contribution to journal › Article › peer-review
Change in the InSb nanocrystal growth direction at the Si/SiO2 interface during ion-beam synthesis. / Tyschenko, Ida; Gutakovskii, Anton; Zhang, Ruonan et al.
In: Materials Letters, Vol. 373, 137114, 15.10.2024.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Change in the InSb nanocrystal growth direction at the Si/SiO2 interface during ion-beam synthesis
AU - Tyschenko, Ida
AU - Gutakovskii, Anton
AU - Zhang, Ruonan
AU - Vdovin, Vladimir
AU - Volodin, Vladimir
AU - Popov, Vladimir
N1 - The Raman spectra were measured with the equipment of the Collective Use Center “VTAN” at the ATRC Department of NSU. The STEM, HRTEM and EDX investigations were carried out using the equipment of the Collective Access Center “Nanostructures” with the support of the Russian Science Foundation [Project 19-72-30023]. The study was supported by the Ministry of Education and Science of the Russian Federation [Project FWGW-2022-0003].
PY - 2024/10/15
Y1 - 2024/10/15
N2 - The effect of annealing time on the InSb nanocrystal formation in a silicon-on-insulator structure, containing, near the Si/SiO2 interface, Si and SiO2 regions implanted with Sb+ and In+ ions, respectively, was studied. The annealing temperature was 1100 °C. A change in the nanocrystal growth direction was obtained as the annealing time increased from 1 to 90 min. After the 1 min annealing, the InSb nanocrystals grew within the Si matrix and were faceted. As the annealing time increased to 90 min, the nanocrystals grew from the Si/SiO2 interface into the SiO2 matrix; they had a half-spherical shape. A respective change in the phonon mode was observed, too. The origin of the obtained effect is discussed.
AB - The effect of annealing time on the InSb nanocrystal formation in a silicon-on-insulator structure, containing, near the Si/SiO2 interface, Si and SiO2 regions implanted with Sb+ and In+ ions, respectively, was studied. The annealing temperature was 1100 °C. A change in the nanocrystal growth direction was obtained as the annealing time increased from 1 to 90 min. After the 1 min annealing, the InSb nanocrystals grew within the Si matrix and were faceted. As the annealing time increased to 90 min, the nanocrystals grew from the Si/SiO2 interface into the SiO2 matrix; they had a half-spherical shape. A respective change in the phonon mode was observed, too. The origin of the obtained effect is discussed.
KW - InSb
KW - Ion implantation
KW - Nanocrystals
KW - Si/SiO2 interface
KW - Silicon-on-insulator
UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85200419546&origin=inward&txGid=e3c604651778c100faa69c295eaf9efb
UR - https://www.mendeley.com/catalogue/a5cddc88-298e-38e0-9e68-c1532f7a6de6/
U2 - 10.1016/j.matlet.2024.137114
DO - 10.1016/j.matlet.2024.137114
M3 - Article
VL - 373
JO - Materials Letters
JF - Materials Letters
SN - 0167-577X
M1 - 137114
ER -
ID: 60391116