Research output: Contribution to journal › Article › peer-review
Atomic and electronic structures of the native defects responsible for the resistive effect in HfO2 : ab initio simulations. / Perevalov, T. V.; Islamov, D. R.
In: Microelectronic Engineering, Vol. 216, 111038, 15.08.2019.Research output: Contribution to journal › Article › peer-review
}
TY - JOUR
T1 - Atomic and electronic structures of the native defects responsible for the resistive effect in HfO2
T2 - ab initio simulations
AU - Perevalov, T. V.
AU - Islamov, D. R.
PY - 2019/8/15
Y1 - 2019/8/15
N2 - The oxygen vacancy, interstitial oxygen and hafnium, hafnium substituting oxygen and oxygen Frenkel pair in HfO2 are the probable defects which are able to participate in the conducting filament formation in hafnia-based RRAM. In this paper, we studied the atomic and electronic structures of above-listed defects within the first principles simulation. It was found that all studied defects can be involved in the charge transport. Oxygen vacancies are the key defects for the charge transport and RRAM operability. It was suggested that interstitial oxygen atoms make a significant contribution to the HfO2 hole conductivity. The hafnium interstitial competes with an oxygen interstitial and the Frenkel pair in the conducting filament formation in O-poor conditions. The oxygen vacancies and hafnium substituting oxygen pairs atomic structure indicate a tendency to these defects clustering.
AB - The oxygen vacancy, interstitial oxygen and hafnium, hafnium substituting oxygen and oxygen Frenkel pair in HfO2 are the probable defects which are able to participate in the conducting filament formation in hafnia-based RRAM. In this paper, we studied the atomic and electronic structures of above-listed defects within the first principles simulation. It was found that all studied defects can be involved in the charge transport. Oxygen vacancies are the key defects for the charge transport and RRAM operability. It was suggested that interstitial oxygen atoms make a significant contribution to the HfO2 hole conductivity. The hafnium interstitial competes with an oxygen interstitial and the Frenkel pair in the conducting filament formation in O-poor conditions. The oxygen vacancies and hafnium substituting oxygen pairs atomic structure indicate a tendency to these defects clustering.
KW - Charge trapping
KW - Density functional theory
KW - Hafnium oxide
KW - Native defects
KW - Oxygen vacancy
KW - RRAM
KW - OXYGEN
UR - http://www.scopus.com/inward/record.url?scp=85067523985&partnerID=8YFLogxK
U2 - 10.1016/j.mee.2019.111038
DO - 10.1016/j.mee.2019.111038
M3 - Article
AN - SCOPUS:85067523985
VL - 216
JO - Microelectronic Engineering
JF - Microelectronic Engineering
SN - 0167-9317
M1 - 111038
ER -
ID: 20642633