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Anomalous sputtering of the lithium triborate single crystal surface by argon cluster ions. / Korobeishchikov, N. G.; Nikolaev, I. V.; Roenko, M. A. et al.

In: Vacuum, Vol. 179, 109555, 09.2020.

Research output: Contribution to journal › Article › peer-review

Harvard

Korobeishchikov, NG, Nikolaev, IV, Roenko, MA, Yakovlev, VV, Pelenovich, V, Fu, DJ & Tosltogouzov, A 2020, 'Anomalous sputtering of the lithium triborate single crystal surface by argon cluster ions', Vacuum, vol. 179, 109555. https://doi.org/10.1016/j.vacuum.2020.109555

APA

Korobeishchikov, N. G., Nikolaev, I. V., Roenko, M. A., Yakovlev, V. V., Pelenovich, V., Fu, D. J., & Tosltogouzov, A. (2020). Anomalous sputtering of the lithium triborate single crystal surface by argon cluster ions. Vacuum, 179, [109555]. https://doi.org/10.1016/j.vacuum.2020.109555

Vancouver

Korobeishchikov NG, Nikolaev IV, Roenko MA, Yakovlev VV, Pelenovich V, Fu DJ et al. Anomalous sputtering of the lithium triborate single crystal surface by argon cluster ions. Vacuum. 2020 Sept;179:109555. doi: 10.1016/j.vacuum.2020.109555

Author

Korobeishchikov, N. G. ; Nikolaev, I. V. ; Roenko, M. A. et al. / Anomalous sputtering of the lithium triborate single crystal surface by argon cluster ions. In: Vacuum. 2020 ; Vol. 179.

BibTeX

@article{5736880ce3b348c2ad40c5b2cf0e2b8a,
title = "Anomalous sputtering of the lithium triborate single crystal surface by argon cluster ions",
abstract = "The formation of giant shallow craters was found on the surface of lithium triborate single crystals after the bombardment by argon cluster ions. The diameter of these craters varied from a few dozen nanometers to 500 nm that is more than an order of magnitude greater than the diameter of common gas cluster ion craters. As distinct from the craters produced by an individual cluster ion impact, anomalous ones were revealed only at the high ion fluence (i.e. at multiple overlapped cluster impacts), both in the high and low incident energy-per-atom bombardment modes (E/N = 105 and 10 eV/atom, respectively). Such anomalous sputtering can be a result of a high local energy release in the cluster-solid collision spots coupled with the presence of water molecules in the subsurface layer of hygroscopic borate-base single crystals.",
keywords = "Gas cluster ion beam, Impact crater, Lithium triborate, Nonlinear optical single crystal, Surface sputtering, BEAM, CRATER FORMATION, DEGRADATION, CSLIB6O10, SILICON SURFACES",
author = "Korobeishchikov, {N. G.} and Nikolaev, {I. V.} and Roenko, {M. A.} and Yakovlev, {V. V.} and V. Pelenovich and Fu, {D. J.} and A. Tosltogouzov",
year = "2020",
month = sep,
doi = "10.1016/j.vacuum.2020.109555",
language = "English",
volume = "179",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier Ltd",

}

RIS

TY - JOUR

T1 - Anomalous sputtering of the lithium triborate single crystal surface by argon cluster ions

AU - Korobeishchikov, N. G.

AU - Nikolaev, I. V.

AU - Roenko, M. A.

AU - Yakovlev, V. V.

AU - Pelenovich, V.

AU - Fu, D. J.

AU - Tosltogouzov, A.

PY - 2020/9

Y1 - 2020/9

N2 - The formation of giant shallow craters was found on the surface of lithium triborate single crystals after the bombardment by argon cluster ions. The diameter of these craters varied from a few dozen nanometers to 500 nm that is more than an order of magnitude greater than the diameter of common gas cluster ion craters. As distinct from the craters produced by an individual cluster ion impact, anomalous ones were revealed only at the high ion fluence (i.e. at multiple overlapped cluster impacts), both in the high and low incident energy-per-atom bombardment modes (E/N = 105 and 10 eV/atom, respectively). Such anomalous sputtering can be a result of a high local energy release in the cluster-solid collision spots coupled with the presence of water molecules in the subsurface layer of hygroscopic borate-base single crystals.

AB - The formation of giant shallow craters was found on the surface of lithium triborate single crystals after the bombardment by argon cluster ions. The diameter of these craters varied from a few dozen nanometers to 500 nm that is more than an order of magnitude greater than the diameter of common gas cluster ion craters. As distinct from the craters produced by an individual cluster ion impact, anomalous ones were revealed only at the high ion fluence (i.e. at multiple overlapped cluster impacts), both in the high and low incident energy-per-atom bombardment modes (E/N = 105 and 10 eV/atom, respectively). Such anomalous sputtering can be a result of a high local energy release in the cluster-solid collision spots coupled with the presence of water molecules in the subsurface layer of hygroscopic borate-base single crystals.

KW - Gas cluster ion beam

KW - Impact crater

KW - Lithium triborate

KW - Nonlinear optical single crystal

KW - Surface sputtering

KW - BEAM

KW - CRATER FORMATION

KW - DEGRADATION

KW - CSLIB6O10

KW - SILICON SURFACES

UR - http://www.scopus.com/inward/record.url?scp=85086893179&partnerID=8YFLogxK

U2 - 10.1016/j.vacuum.2020.109555

DO - 10.1016/j.vacuum.2020.109555

M3 - Article

AN - SCOPUS:85086893179

VL - 179

JO - Vacuum

JF - Vacuum

SN - 0042-207X

M1 - 109555

ER -

ID: 24589950