Research output: Contribution to journal › Article › peer-review
| Translated title of the contribution | Composition and optical properties of amorphous plasma-chemical silicon oxynitride of variable composition a SiOxNy:H |
|---|---|
| Original language | Russian |
| Article number | 20 |
| Pages (from-to) | 575-582 |
| Number of pages | 8 |
| Journal | Журнал технической физики |
| Volume | 93 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - Mar 2023 |
ID: 55437658