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Способ формирования интенсивного пучка газовых частиц для модификации поверхности материалов, основанный на технологии газовых кластерных ионов
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Patent for invention
Applied Physics Division
Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics
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https://new.fips.ru/registers-doc-view/fips_servlet?DB=RUPAT&DocNumber=2811079&TypeFile=html
Николай Геннадьевич Коробейщиков
(Author)
Иван Владимирович Николаев
(Author)
Original language
Russian
Patent number
2811079
Priority date
19.04.2023
Filing date
19.04.2023
Publication status
Published -
11 Jan 2024
State classification of scientific and technological information
29.29.49 Atomic clusters. Molecular clusters
29.29.41 Interaction of atoms and molecules with the environment
29.19.21 Effect of irradiation on properties of solids
ID: 51929956
