Research output: Contribution to journal › Article › peer-review
Final published version
| Original language | Russian |
|---|---|
| Article number | 7 |
| Pages (from-to) | 71-75 |
| Number of pages | 5 |
| Journal | Вакуумная техника и технология |
| Volume | 28 |
| Issue number | 1 |
| Publication status | Published - 2018 |
ID: 27267973