General Physics Section

Кафедра физики СУНЦ

Research output

  1. Al2O3/InGaAs interface passivation by fluorine-containing anodic layers

    Research output: Contribution to journalArticlepeer-review

  2. Searching Optimal Growth Parameters for HfO Applied by Plasma-Enhanced Atomic Layer Deposition Method

    Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

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ID: 3441760