Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
Study of TLIPSS formation on different metals and alloys and their selective etching. / Dostovalov, Alexandr V.; Korolkov, Victor P.; Terentiev, Vadim S. и др.
Laser-Based Micro- and Nanoprocessing XI. ред. / U Klotzbach; K Washio; R Kling. Том 10092 SPIE, 2017. 100921H (Proceedings of SPIE; Том 10092).Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
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TY - GEN
T1 - Study of TLIPSS formation on different metals and alloys and their selective etching
AU - Dostovalov, Alexandr V.
AU - Korolkov, Victor P.
AU - Terentiev, Vadim S.
AU - Okotrub, Konstantin A.
AU - Dultsev, Fedor N.
AU - Nemykin, Anton
AU - Babin, Sergey A.
PY - 2017/1/1
Y1 - 2017/1/1
N2 - Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period ≈λ) and thermochemical (with period ≈λ) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.
AB - Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period ≈λ) and thermochemical (with period ≈λ) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.
KW - femtosecond laser
KW - LIPSS
KW - thermochemical modification
KW - thin metal films
UR - http://www.scopus.com/inward/record.url?scp=85019497978&partnerID=8YFLogxK
U2 - 10.1117/12.2251341
DO - 10.1117/12.2251341
M3 - Conference contribution
AN - SCOPUS:85019497978
SN - 978-1-5106-0626-5
VL - 10092
T3 - Proceedings of SPIE
BT - Laser-Based Micro- and Nanoprocessing XI
A2 - Klotzbach, U
A2 - Washio, K
A2 - Kling, R
PB - SPIE
T2 - Laser-Based Micro- and Nanoprocessing XI 2017
Y2 - 31 January 2017 through 2 February 2017
ER -
ID: 10192676