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Study of TLIPSS formation on different metals and alloys and their selective etching. / Dostovalov, Alexandr V.; Korolkov, Victor P.; Terentiev, Vadim S. et al.

Laser-Based Micro- and Nanoprocessing XI. ed. / U Klotzbach; K Washio; R Kling. Vol. 10092 SPIE, 2017. 100921H (Proceedings of SPIE; Vol. 10092).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Harvard

Dostovalov, AV, Korolkov, VP, Terentiev, VS, Okotrub, KA, Dultsev, FN, Nemykin, A & Babin, SA 2017, Study of TLIPSS formation on different metals and alloys and their selective etching. in U Klotzbach, K Washio & R Kling (eds), Laser-Based Micro- and Nanoprocessing XI. vol. 10092, 100921H, Proceedings of SPIE, vol. 10092, SPIE, Laser-Based Micro- and Nanoprocessing XI 2017, San Francisco, United States, 31.01.2017. https://doi.org/10.1117/12.2251341

APA

Dostovalov, A. V., Korolkov, V. P., Terentiev, V. S., Okotrub, K. A., Dultsev, F. N., Nemykin, A., & Babin, S. A. (2017). Study of TLIPSS formation on different metals and alloys and their selective etching. In U. Klotzbach, K. Washio, & R. Kling (Eds.), Laser-Based Micro- and Nanoprocessing XI (Vol. 10092). [100921H] (Proceedings of SPIE; Vol. 10092). SPIE. https://doi.org/10.1117/12.2251341

Vancouver

Dostovalov AV, Korolkov VP, Terentiev VS, Okotrub KA, Dultsev FN, Nemykin A et al. Study of TLIPSS formation on different metals and alloys and their selective etching. In Klotzbach U, Washio K, Kling R, editors, Laser-Based Micro- and Nanoprocessing XI. Vol. 10092. SPIE. 2017. 100921H. (Proceedings of SPIE). doi: 10.1117/12.2251341

Author

Dostovalov, Alexandr V. ; Korolkov, Victor P. ; Terentiev, Vadim S. et al. / Study of TLIPSS formation on different metals and alloys and their selective etching. Laser-Based Micro- and Nanoprocessing XI. editor / U Klotzbach ; K Washio ; R Kling. Vol. 10092 SPIE, 2017. (Proceedings of SPIE).

BibTeX

@inproceedings{8febe108eaaf449a840e71eaf29761b7,
title = "Study of TLIPSS formation on different metals and alloys and their selective etching",
abstract = "Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period ≈λ) and thermochemical (with period ≈λ) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.",
keywords = "femtosecond laser, LIPSS, thermochemical modification, thin metal films",
author = "Dostovalov, {Alexandr V.} and Korolkov, {Victor P.} and Terentiev, {Vadim S.} and Okotrub, {Konstantin A.} and Dultsev, {Fedor N.} and Anton Nemykin and Babin, {Sergey A.}",
year = "2017",
month = jan,
day = "1",
doi = "10.1117/12.2251341",
language = "English",
isbn = "978-1-5106-0626-5",
volume = "10092",
series = "Proceedings of SPIE",
publisher = "SPIE",
editor = "U Klotzbach and K Washio and R Kling",
booktitle = "Laser-Based Micro- and Nanoprocessing XI",
address = "United States",
note = "Laser-Based Micro- and Nanoprocessing XI 2017 ; Conference date: 31-01-2017 Through 02-02-2017",

}

RIS

TY - GEN

T1 - Study of TLIPSS formation on different metals and alloys and their selective etching

AU - Dostovalov, Alexandr V.

AU - Korolkov, Victor P.

AU - Terentiev, Vadim S.

AU - Okotrub, Konstantin A.

AU - Dultsev, Fedor N.

AU - Nemykin, Anton

AU - Babin, Sergey A.

PY - 2017/1/1

Y1 - 2017/1/1

N2 - Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period ≈λ) and thermochemical (with period ≈λ) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.

AB - Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period ≈λ) and thermochemical (with period ≈λ) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.

KW - femtosecond laser

KW - LIPSS

KW - thermochemical modification

KW - thin metal films

UR - http://www.scopus.com/inward/record.url?scp=85019497978&partnerID=8YFLogxK

U2 - 10.1117/12.2251341

DO - 10.1117/12.2251341

M3 - Conference contribution

AN - SCOPUS:85019497978

SN - 978-1-5106-0626-5

VL - 10092

T3 - Proceedings of SPIE

BT - Laser-Based Micro- and Nanoprocessing XI

A2 - Klotzbach, U

A2 - Washio, K

A2 - Kling, R

PB - SPIE

T2 - Laser-Based Micro- and Nanoprocessing XI 2017

Y2 - 31 January 2017 through 2 February 2017

ER -

ID: 10192676