Standard

Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition. / Сафонов, Алексей Иванович; Суляева, Вероника; Богословцева, Алена Леонидовна и др.

в: Journal of Applied Mechanics and Technical Physics, Том 59, № 5, 10, 01.09.2018, стр. 842-846.

Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование

Harvard

Сафонов, АИ, Суляева, В, Богословцева, АЛ & Тимошенко, НИ 2018, 'Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition', Journal of Applied Mechanics and Technical Physics, Том. 59, № 5, 10, стр. 842-846. https://doi.org/10.1134/S0021894418050103

APA

Сафонов, А. И., Суляева, В., Богословцева, А. Л., & Тимошенко, Н. И. (2018). Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition. Journal of Applied Mechanics and Technical Physics, 59(5), 842-846. [10]. https://doi.org/10.1134/S0021894418050103

Vancouver

Сафонов АИ, Суляева В, Богословцева АЛ, Тимошенко НИ. Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition. Journal of Applied Mechanics and Technical Physics. 2018 сент. 1;59(5):842-846. 10. doi: 10.1134/S0021894418050103

Author

Сафонов, Алексей Иванович ; Суляева, Вероника ; Богословцева, Алена Леонидовна и др. / Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition. в: Journal of Applied Mechanics and Technical Physics. 2018 ; Том 59, № 5. стр. 842-846.

BibTeX

@article{8ff866afa11644dfa8e147c9986427fa,
title = "Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition",
abstract = "The formation of a fluoropolymer coating by chemical deposition has been studied experimentally. It has been found that increasing the flow rate of the precursor gas leads to a decrease in the growth rate of the coating. Deposition conditions were analyzed, and the gas-dynamic parameters of the process were estimated. The estimates are consistent with experimental data.",
keywords = "catalyst, fluoropolymer, gas-dynamic flow regime, HWCVD, thin films",
author = "Сафонов, {Алексей Иванович} and Вероника Суляева and Богословцева, {Алена Леонидовна} and Тимошенко, {Николай Иванович}",
note = "Publisher Copyright: {\textcopyright} 2018, Pleiades Publishing, Ltd.",
year = "2018",
month = sep,
day = "1",
doi = "10.1134/S0021894418050103",
language = "English",
volume = "59",
pages = "842--846",
journal = "Journal of Applied Mechanics and Technical Physics",
issn = "0021-8944",
publisher = "Maik Nauka-Interperiodica Publishing",
number = "5",

}

RIS

TY - JOUR

T1 - Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition

AU - Сафонов, Алексей Иванович

AU - Суляева, Вероника

AU - Богословцева, Алена Леонидовна

AU - Тимошенко, Николай Иванович

N1 - Publisher Copyright: © 2018, Pleiades Publishing, Ltd.

PY - 2018/9/1

Y1 - 2018/9/1

N2 - The formation of a fluoropolymer coating by chemical deposition has been studied experimentally. It has been found that increasing the flow rate of the precursor gas leads to a decrease in the growth rate of the coating. Deposition conditions were analyzed, and the gas-dynamic parameters of the process were estimated. The estimates are consistent with experimental data.

AB - The formation of a fluoropolymer coating by chemical deposition has been studied experimentally. It has been found that increasing the flow rate of the precursor gas leads to a decrease in the growth rate of the coating. Deposition conditions were analyzed, and the gas-dynamic parameters of the process were estimated. The estimates are consistent with experimental data.

KW - catalyst

KW - fluoropolymer

KW - gas-dynamic flow regime

KW - HWCVD

KW - thin films

UR - http://www.scopus.com/inward/record.url?scp=85056211878&partnerID=8YFLogxK

U2 - 10.1134/S0021894418050103

DO - 10.1134/S0021894418050103

M3 - Article

VL - 59

SP - 842

EP - 846

JO - Journal of Applied Mechanics and Technical Physics

JF - Journal of Applied Mechanics and Technical Physics

SN - 0021-8944

IS - 5

M1 - 10

ER -

ID: 36827436