Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition. / Сафонов, Алексей Иванович; Суляева, Вероника; Богословцева, Алена Леонидовна et al.
In: Journal of Applied Mechanics and Technical Physics, Vol. 59, No. 5, 10, 01.09.2018, p. 842-846.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition
AU - Сафонов, Алексей Иванович
AU - Суляева, Вероника
AU - Богословцева, Алена Леонидовна
AU - Тимошенко, Николай Иванович
N1 - Publisher Copyright: © 2018, Pleiades Publishing, Ltd.
PY - 2018/9/1
Y1 - 2018/9/1
N2 - The formation of a fluoropolymer coating by chemical deposition has been studied experimentally. It has been found that increasing the flow rate of the precursor gas leads to a decrease in the growth rate of the coating. Deposition conditions were analyzed, and the gas-dynamic parameters of the process were estimated. The estimates are consistent with experimental data.
AB - The formation of a fluoropolymer coating by chemical deposition has been studied experimentally. It has been found that increasing the flow rate of the precursor gas leads to a decrease in the growth rate of the coating. Deposition conditions were analyzed, and the gas-dynamic parameters of the process were estimated. The estimates are consistent with experimental data.
KW - catalyst
KW - fluoropolymer
KW - gas-dynamic flow regime
KW - HWCVD
KW - thin films
UR - http://www.scopus.com/inward/record.url?scp=85056211878&partnerID=8YFLogxK
U2 - 10.1134/S0021894418050103
DO - 10.1134/S0021894418050103
M3 - Article
VL - 59
SP - 842
EP - 846
JO - Journal of Applied Mechanics and Technical Physics
JF - Journal of Applied Mechanics and Technical Physics
SN - 0021-8944
IS - 5
M1 - 10
ER -
ID: 36827436