Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Electrical and optical characteristics of boron doped nanocrystalline diamond films. / Stuchliková, T. H.; Remes, Z.; Mortet, V. и др.
в: Vacuum, Том 168, 108813, 01.10.2019.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Electrical and optical characteristics of boron doped nanocrystalline diamond films
AU - Stuchliková, T. H.
AU - Remes, Z.
AU - Mortet, V.
AU - Taylor, A.
AU - Ashcheulov, P.
AU - Stuchlik, J.
AU - Volodin, V. A.
PY - 2019/10/1
Y1 - 2019/10/1
N2 - Boron doped diamond is a prospective material which can be used as a conductive and optically transparent thin-film electrode in a variety of optoelectronic applications. In this work, we present the results of the temperature resolved electrical conductivity, optical reflection, transmission and absorption of thin boron doped nanocrystalline diamond films grown by a microwave plasma enhanced chemical vapor deposition. Optical transmittance, reflectance and absorptance properties of layers were studied by a photo-thermal deflection spectroscopy analysis. Raman spectroscopy with various excitation wavelengths was employed for the analysis of nanocrystalline diamond layers. The measured position, shift and broadening of the characteristic boron doped diamond Raman lines were used for the determination of the boron concentration. Correlation between the results of the atomic boron concentration estimated via the Raman analysis and measured electrical conductivity values is presented.
AB - Boron doped diamond is a prospective material which can be used as a conductive and optically transparent thin-film electrode in a variety of optoelectronic applications. In this work, we present the results of the temperature resolved electrical conductivity, optical reflection, transmission and absorption of thin boron doped nanocrystalline diamond films grown by a microwave plasma enhanced chemical vapor deposition. Optical transmittance, reflectance and absorptance properties of layers were studied by a photo-thermal deflection spectroscopy analysis. Raman spectroscopy with various excitation wavelengths was employed for the analysis of nanocrystalline diamond layers. The measured position, shift and broadening of the characteristic boron doped diamond Raman lines were used for the determination of the boron concentration. Correlation between the results of the atomic boron concentration estimated via the Raman analysis and measured electrical conductivity values is presented.
KW - INDIUM OXIDE
KW - FANO
UR - http://www.scopus.com/inward/record.url?scp=85069544376&partnerID=8YFLogxK
U2 - 10.1016/j.vacuum.2019.108813
DO - 10.1016/j.vacuum.2019.108813
M3 - Article
AN - SCOPUS:85069544376
VL - 168
JO - Vacuum
JF - Vacuum
SN - 0042-207X
M1 - 108813
ER -
ID: 21048237