Standard

Electrical and optical characteristics of boron doped nanocrystalline diamond films. / Stuchliková, T. H.; Remes, Z.; Mortet, V. et al.

In: Vacuum, Vol. 168, 108813, 01.10.2019.

Research output: Contribution to journal › Article › peer-review

Harvard

Stuchliková, TH, Remes, Z, Mortet, V, Taylor, A, Ashcheulov, P, Stuchlik, J & Volodin, VA 2019, 'Electrical and optical characteristics of boron doped nanocrystalline diamond films', Vacuum, vol. 168, 108813. https://doi.org/10.1016/j.vacuum.2019.108813

APA

Stuchliková, T. H., Remes, Z., Mortet, V., Taylor, A., Ashcheulov, P., Stuchlik, J., & Volodin, V. A. (2019). Electrical and optical characteristics of boron doped nanocrystalline diamond films. Vacuum, 168, [108813]. https://doi.org/10.1016/j.vacuum.2019.108813

Vancouver

Stuchliková TH, Remes Z, Mortet V, Taylor A, Ashcheulov P, Stuchlik J et al. Electrical and optical characteristics of boron doped nanocrystalline diamond films. Vacuum. 2019 Oct 1;168:108813. doi: 10.1016/j.vacuum.2019.108813

Author

Stuchliková, T. H. ; Remes, Z. ; Mortet, V. et al. / Electrical and optical characteristics of boron doped nanocrystalline diamond films. In: Vacuum. 2019 ; Vol. 168.

BibTeX

@article{c8c74dcb2194493eae6b59219b668c28,
title = "Electrical and optical characteristics of boron doped nanocrystalline diamond films",
abstract = "Boron doped diamond is a prospective material which can be used as a conductive and optically transparent thin-film electrode in a variety of optoelectronic applications. In this work, we present the results of the temperature resolved electrical conductivity, optical reflection, transmission and absorption of thin boron doped nanocrystalline diamond films grown by a microwave plasma enhanced chemical vapor deposition. Optical transmittance, reflectance and absorptance properties of layers were studied by a photo-thermal deflection spectroscopy analysis. Raman spectroscopy with various excitation wavelengths was employed for the analysis of nanocrystalline diamond layers. The measured position, shift and broadening of the characteristic boron doped diamond Raman lines were used for the determination of the boron concentration. Correlation between the results of the atomic boron concentration estimated via the Raman analysis and measured electrical conductivity values is presented.",
keywords = "INDIUM OXIDE, FANO",
author = "Stuchlikov{\'a}, {T. H.} and Z. Remes and V. Mortet and A. Taylor and P. Ashcheulov and J. Stuchlik and Volodin, {V. A.}",
year = "2019",
month = oct,
day = "1",
doi = "10.1016/j.vacuum.2019.108813",
language = "English",
volume = "168",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier Ltd",

}

RIS

TY - JOUR

T1 - Electrical and optical characteristics of boron doped nanocrystalline diamond films

AU - Stuchliková, T. H.

AU - Remes, Z.

AU - Mortet, V.

AU - Taylor, A.

AU - Ashcheulov, P.

AU - Stuchlik, J.

AU - Volodin, V. A.

PY - 2019/10/1

Y1 - 2019/10/1

N2 - Boron doped diamond is a prospective material which can be used as a conductive and optically transparent thin-film electrode in a variety of optoelectronic applications. In this work, we present the results of the temperature resolved electrical conductivity, optical reflection, transmission and absorption of thin boron doped nanocrystalline diamond films grown by a microwave plasma enhanced chemical vapor deposition. Optical transmittance, reflectance and absorptance properties of layers were studied by a photo-thermal deflection spectroscopy analysis. Raman spectroscopy with various excitation wavelengths was employed for the analysis of nanocrystalline diamond layers. The measured position, shift and broadening of the characteristic boron doped diamond Raman lines were used for the determination of the boron concentration. Correlation between the results of the atomic boron concentration estimated via the Raman analysis and measured electrical conductivity values is presented.

AB - Boron doped diamond is a prospective material which can be used as a conductive and optically transparent thin-film electrode in a variety of optoelectronic applications. In this work, we present the results of the temperature resolved electrical conductivity, optical reflection, transmission and absorption of thin boron doped nanocrystalline diamond films grown by a microwave plasma enhanced chemical vapor deposition. Optical transmittance, reflectance and absorptance properties of layers were studied by a photo-thermal deflection spectroscopy analysis. Raman spectroscopy with various excitation wavelengths was employed for the analysis of nanocrystalline diamond layers. The measured position, shift and broadening of the characteristic boron doped diamond Raman lines were used for the determination of the boron concentration. Correlation between the results of the atomic boron concentration estimated via the Raman analysis and measured electrical conductivity values is presented.

KW - INDIUM OXIDE

KW - FANO

UR - http://www.scopus.com/inward/record.url?scp=85069544376&partnerID=8YFLogxK

U2 - 10.1016/j.vacuum.2019.108813

DO - 10.1016/j.vacuum.2019.108813

M3 - Article

AN - SCOPUS:85069544376

VL - 168

JO - Vacuum

JF - Vacuum

SN - 0042-207X

M1 - 108813

ER -

ID: 21048237