Standard

Efficient and improved qualification method for patterns with irregular edges in printed electronics. / Liu, Ting Jeng; Hsu, Shao Min; Wu, Meng Jhu и др.

в: Journal of Micromechanics and Microengineering, Том 29, № 12, 124005, 05.11.2019.

Результаты исследований: Научные публикации в периодических изданияхстатьяРецензирование

Harvard

Liu, TJ, Hsu, SM, Wu, MJ, Ianko, P & Lo, CY 2019, 'Efficient and improved qualification method for patterns with irregular edges in printed electronics', Journal of Micromechanics and Microengineering, Том. 29, № 12, 124005. https://doi.org/10.1088/1361-6439/ab4ed7

APA

Liu, T. J., Hsu, S. M., Wu, M. J., Ianko, P., & Lo, C. Y. (2019). Efficient and improved qualification method for patterns with irregular edges in printed electronics. Journal of Micromechanics and Microengineering, 29(12), [124005]. https://doi.org/10.1088/1361-6439/ab4ed7

Vancouver

Liu TJ, Hsu SM, Wu MJ, Ianko P, Lo CY. Efficient and improved qualification method for patterns with irregular edges in printed electronics. Journal of Micromechanics and Microengineering. 2019 нояб. 5;29(12):124005. doi: 10.1088/1361-6439/ab4ed7

Author

Liu, Ting Jeng ; Hsu, Shao Min ; Wu, Meng Jhu и др. / Efficient and improved qualification method for patterns with irregular edges in printed electronics. в: Journal of Micromechanics and Microengineering. 2019 ; Том 29, № 12.

BibTeX

@article{9d1e0f6f502b45feaa4da81d2e174df0,
title = "Efficient and improved qualification method for patterns with irregular edges in printed electronics",
abstract = "This paper reports a proposal for an advanced and efficient method to evaluate the pattern transfer completeness (PTC) in terms of line edge roughness (LER) by quantifying the deviations of printed patterns statistically in regards to their original designed patterns. Three substantial errors in the existing method are corrected by the proposed method with evidence from iterative examinations. With the use of identical images of complex patterns expressible in parametric forms such as Archimedean, logarithmic, and hyperbolic spirals, error corrections and efficiency improvements compared to the existing method are proven. Comprehensive studies for image operation, reference point definition, deviation acquisition, contour point creation, and LER calculation were performed. In addition, this work involves analyses of the errors in the existing method, the efficiency improvement of the proposed method, the impact of variations on point density, and the validity of the LER calculations. The results show that the proposed method not only correctly evaluates the PTC of printed patterns with on average 97.6% efficiency enhancement, with at most 37.7% correctness improvement, but also displayed operation flexibility with the controllable point density in comparison to the existing method.",
keywords = "inkjet printing, line edge roughness, pattern transfer completeness, printed electronics, INKJET, SURFACE, SENSOR, ROUGHNESS, LINES",
author = "Liu, {Ting Jeng} and Hsu, {Shao Min} and Wu, {Meng Jhu} and Pavel Ianko and Lo, {Cheng Yao}",
year = "2019",
month = nov,
day = "5",
doi = "10.1088/1361-6439/ab4ed7",
language = "English",
volume = "29",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "12",

}

RIS

TY - JOUR

T1 - Efficient and improved qualification method for patterns with irregular edges in printed electronics

AU - Liu, Ting Jeng

AU - Hsu, Shao Min

AU - Wu, Meng Jhu

AU - Ianko, Pavel

AU - Lo, Cheng Yao

PY - 2019/11/5

Y1 - 2019/11/5

N2 - This paper reports a proposal for an advanced and efficient method to evaluate the pattern transfer completeness (PTC) in terms of line edge roughness (LER) by quantifying the deviations of printed patterns statistically in regards to their original designed patterns. Three substantial errors in the existing method are corrected by the proposed method with evidence from iterative examinations. With the use of identical images of complex patterns expressible in parametric forms such as Archimedean, logarithmic, and hyperbolic spirals, error corrections and efficiency improvements compared to the existing method are proven. Comprehensive studies for image operation, reference point definition, deviation acquisition, contour point creation, and LER calculation were performed. In addition, this work involves analyses of the errors in the existing method, the efficiency improvement of the proposed method, the impact of variations on point density, and the validity of the LER calculations. The results show that the proposed method not only correctly evaluates the PTC of printed patterns with on average 97.6% efficiency enhancement, with at most 37.7% correctness improvement, but also displayed operation flexibility with the controllable point density in comparison to the existing method.

AB - This paper reports a proposal for an advanced and efficient method to evaluate the pattern transfer completeness (PTC) in terms of line edge roughness (LER) by quantifying the deviations of printed patterns statistically in regards to their original designed patterns. Three substantial errors in the existing method are corrected by the proposed method with evidence from iterative examinations. With the use of identical images of complex patterns expressible in parametric forms such as Archimedean, logarithmic, and hyperbolic spirals, error corrections and efficiency improvements compared to the existing method are proven. Comprehensive studies for image operation, reference point definition, deviation acquisition, contour point creation, and LER calculation were performed. In addition, this work involves analyses of the errors in the existing method, the efficiency improvement of the proposed method, the impact of variations on point density, and the validity of the LER calculations. The results show that the proposed method not only correctly evaluates the PTC of printed patterns with on average 97.6% efficiency enhancement, with at most 37.7% correctness improvement, but also displayed operation flexibility with the controllable point density in comparison to the existing method.

KW - inkjet printing

KW - line edge roughness

KW - pattern transfer completeness

KW - printed electronics

KW - INKJET

KW - SURFACE

KW - SENSOR

KW - ROUGHNESS

KW - LINES

UR - http://www.scopus.com/inward/record.url?scp=85076023697&partnerID=8YFLogxK

U2 - 10.1088/1361-6439/ab4ed7

DO - 10.1088/1361-6439/ab4ed7

M3 - Article

AN - SCOPUS:85076023697

VL - 29

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 12

M1 - 124005

ER -

ID: 22576933