Research output: Contribution to journal › Article › peer-review
Efficient and improved qualification method for patterns with irregular edges in printed electronics. / Liu, Ting Jeng; Hsu, Shao Min; Wu, Meng Jhu et al.
In: Journal of Micromechanics and Microengineering, Vol. 29, No. 12, 124005, 05.11.2019.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Efficient and improved qualification method for patterns with irregular edges in printed electronics
AU - Liu, Ting Jeng
AU - Hsu, Shao Min
AU - Wu, Meng Jhu
AU - Ianko, Pavel
AU - Lo, Cheng Yao
PY - 2019/11/5
Y1 - 2019/11/5
N2 - This paper reports a proposal for an advanced and efficient method to evaluate the pattern transfer completeness (PTC) in terms of line edge roughness (LER) by quantifying the deviations of printed patterns statistically in regards to their original designed patterns. Three substantial errors in the existing method are corrected by the proposed method with evidence from iterative examinations. With the use of identical images of complex patterns expressible in parametric forms such as Archimedean, logarithmic, and hyperbolic spirals, error corrections and efficiency improvements compared to the existing method are proven. Comprehensive studies for image operation, reference point definition, deviation acquisition, contour point creation, and LER calculation were performed. In addition, this work involves analyses of the errors in the existing method, the efficiency improvement of the proposed method, the impact of variations on point density, and the validity of the LER calculations. The results show that the proposed method not only correctly evaluates the PTC of printed patterns with on average 97.6% efficiency enhancement, with at most 37.7% correctness improvement, but also displayed operation flexibility with the controllable point density in comparison to the existing method.
AB - This paper reports a proposal for an advanced and efficient method to evaluate the pattern transfer completeness (PTC) in terms of line edge roughness (LER) by quantifying the deviations of printed patterns statistically in regards to their original designed patterns. Three substantial errors in the existing method are corrected by the proposed method with evidence from iterative examinations. With the use of identical images of complex patterns expressible in parametric forms such as Archimedean, logarithmic, and hyperbolic spirals, error corrections and efficiency improvements compared to the existing method are proven. Comprehensive studies for image operation, reference point definition, deviation acquisition, contour point creation, and LER calculation were performed. In addition, this work involves analyses of the errors in the existing method, the efficiency improvement of the proposed method, the impact of variations on point density, and the validity of the LER calculations. The results show that the proposed method not only correctly evaluates the PTC of printed patterns with on average 97.6% efficiency enhancement, with at most 37.7% correctness improvement, but also displayed operation flexibility with the controllable point density in comparison to the existing method.
KW - inkjet printing
KW - line edge roughness
KW - pattern transfer completeness
KW - printed electronics
KW - INKJET
KW - SURFACE
KW - SENSOR
KW - ROUGHNESS
KW - LINES
UR - http://www.scopus.com/inward/record.url?scp=85076023697&partnerID=8YFLogxK
U2 - 10.1088/1361-6439/ab4ed7
DO - 10.1088/1361-6439/ab4ed7
M3 - Article
AN - SCOPUS:85076023697
VL - 29
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
SN - 0960-1317
IS - 12
M1 - 124005
ER -
ID: 22576933