Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Determination of the infrared absorption cross-section of the stretching vibrations of Ge–O bonds in GeOx films. / Zhang, Fan; Volodin, V. A.; Astankova, K. N. и др.
в: Results in Chemistry, Том 4, 100461, 01.2022.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Determination of the infrared absorption cross-section of the stretching vibrations of Ge–O bonds in GeOx films
AU - Zhang, Fan
AU - Volodin, V. A.
AU - Astankova, K. N.
AU - Kamaev, G. N.
AU - Azarov, I. A.
AU - Prosvirin, I. P.
AU - Vergnat, M.
N1 - Funding Information: The study was supported: in the part of growth and studies of as-deposited GeO x films by the Russian Scientific Fund (project No. 22-19-00369); in the part of studies of annealed GeO x films by the Ministry of Science and Higher Education of the Russian Federation, project No. FWGW-2022-0011. Publisher Copyright: © 2022 The Author(s)
PY - 2022/1
Y1 - 2022/1
N2 - The cross-section of the infrared (IR) absorption of the Ge-O stretching mode in both GeO2 and GeOx films was determined. The GeO2 film was obtained by thermal oxidation of germanium while the GeOx film was obtained by physical vapor deposition. The latter was then annealed at a temperature of 550 °C for 30 min. Both the as-deposited and the annealed films were studied using IR absorption spectroscopy, Raman spectroscopy, ellipsometry and X-ray photoelectron spectroscopy. We found the absorption cross-section is about 2 ÷ 2.6·10–19 cm−2 for the GeO2 films and 0.8·10−19 cm−2 for the GeOx (x ∼ 1.1) film.
AB - The cross-section of the infrared (IR) absorption of the Ge-O stretching mode in both GeO2 and GeOx films was determined. The GeO2 film was obtained by thermal oxidation of germanium while the GeOx film was obtained by physical vapor deposition. The latter was then annealed at a temperature of 550 °C for 30 min. Both the as-deposited and the annealed films were studied using IR absorption spectroscopy, Raman spectroscopy, ellipsometry and X-ray photoelectron spectroscopy. We found the absorption cross-section is about 2 ÷ 2.6·10–19 cm−2 for the GeO2 films and 0.8·10−19 cm−2 for the GeOx (x ∼ 1.1) film.
KW - Absorption cross-section
KW - FTIR spectroscopy
KW - Ge-O bonds
KW - GeO films
KW - GeOx films
UR - http://www.scopus.com/inward/record.url?scp=85135691943&partnerID=8YFLogxK
UR - https://www.mendeley.com/catalogue/5ec0d957-aa03-3b5d-8d4f-97083c2e2778/
U2 - 10.1016/j.rechem.2022.100461
DO - 10.1016/j.rechem.2022.100461
M3 - Article
AN - SCOPUS:85135691943
VL - 4
JO - Results in Chemistry
JF - Results in Chemistry
SN - 2211-7156
M1 - 100461
ER -
ID: 36845307